JPS60260437A - 光フアイバ用ガラス母材の製造方法 - Google Patents
光フアイバ用ガラス母材の製造方法Info
- Publication number
- JPS60260437A JPS60260437A JP11662684A JP11662684A JPS60260437A JP S60260437 A JPS60260437 A JP S60260437A JP 11662684 A JP11662684 A JP 11662684A JP 11662684 A JP11662684 A JP 11662684A JP S60260437 A JPS60260437 A JP S60260437A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- raw material
- heated
- burner
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 title claims abstract description 70
- 239000000463 material Substances 0.000 title claims abstract description 27
- 239000013307 optical fiber Substances 0.000 title claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 239000007789 gas Substances 0.000 claims abstract description 133
- 238000010438 heat treatment Methods 0.000 claims abstract description 44
- 239000000654 additive Substances 0.000 claims abstract description 11
- 239000011261 inert gas Substances 0.000 claims abstract description 7
- 239000002994 raw material Substances 0.000 claims description 110
- 238000000034 method Methods 0.000 claims description 28
- 230000000996 additive effect Effects 0.000 claims description 5
- 238000009835 boiling Methods 0.000 claims description 2
- 238000010574 gas phase reaction Methods 0.000 claims description 2
- 239000012159 carrier gas Substances 0.000 abstract description 19
- 238000006243 chemical reaction Methods 0.000 abstract description 7
- 238000007711 solidification Methods 0.000 abstract description 3
- 230000008023 solidification Effects 0.000 abstract description 3
- 239000007858 starting material Substances 0.000 abstract 10
- 239000012808 vapor phase Substances 0.000 abstract 2
- 229910003910 SiCl4 Inorganic materials 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 abstract 1
- 239000002585 base Substances 0.000 description 22
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 239000000567 combustion gas Substances 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- 239000005049 silicon tetrachloride Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000005373 porous glass Substances 0.000 description 3
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910003074 TiCl4 Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 239000011364 vaporized material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/81—Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11662684A JPS60260437A (ja) | 1984-06-08 | 1984-06-08 | 光フアイバ用ガラス母材の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11662684A JPS60260437A (ja) | 1984-06-08 | 1984-06-08 | 光フアイバ用ガラス母材の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60260437A true JPS60260437A (ja) | 1985-12-23 |
| JPH0480860B2 JPH0480860B2 (enrdf_load_stackoverflow) | 1992-12-21 |
Family
ID=14691850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11662684A Granted JPS60260437A (ja) | 1984-06-08 | 1984-06-08 | 光フアイバ用ガラス母材の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60260437A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61151032A (ja) * | 1984-12-24 | 1986-07-09 | Hitachi Cable Ltd | 光フアイバ母材製造用原料ガス供給装置 |
| JPS61191533A (ja) * | 1985-02-18 | 1986-08-26 | Sumitomo Electric Ind Ltd | ガス反応装置 |
| JPS6321233A (ja) * | 1986-07-15 | 1988-01-28 | Sumitomo Electric Ind Ltd | 光フアイバ用母材の製造方法 |
| US8356494B2 (en) | 2009-02-24 | 2013-01-22 | Asahi Glass Company, Limited | Process for producing porous quartz glass object, and optical member for EUV lithography |
| JP2014224007A (ja) * | 2013-05-15 | 2014-12-04 | 住友電気工業株式会社 | ガラス微粒子堆積体の製造方法およびガラス微粒子堆積体製造用バーナー |
| JP2017036172A (ja) * | 2015-08-07 | 2017-02-16 | 株式会社フジクラ | 光ファイバ母材の製造方法 |
-
1984
- 1984-06-08 JP JP11662684A patent/JPS60260437A/ja active Granted
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61151032A (ja) * | 1984-12-24 | 1986-07-09 | Hitachi Cable Ltd | 光フアイバ母材製造用原料ガス供給装置 |
| JPS61191533A (ja) * | 1985-02-18 | 1986-08-26 | Sumitomo Electric Ind Ltd | ガス反応装置 |
| JPS6321233A (ja) * | 1986-07-15 | 1988-01-28 | Sumitomo Electric Ind Ltd | 光フアイバ用母材の製造方法 |
| US8356494B2 (en) | 2009-02-24 | 2013-01-22 | Asahi Glass Company, Limited | Process for producing porous quartz glass object, and optical member for EUV lithography |
| JP5578167B2 (ja) * | 2009-02-24 | 2014-08-27 | 旭硝子株式会社 | 多孔質石英ガラス体の製造方法およびｅｕｖリソグラフィ用光学部材 |
| JP2014224007A (ja) * | 2013-05-15 | 2014-12-04 | 住友電気工業株式会社 | ガラス微粒子堆積体の製造方法およびガラス微粒子堆積体製造用バーナー |
| JP2017036172A (ja) * | 2015-08-07 | 2017-02-16 | 株式会社フジクラ | 光ファイバ母材の製造方法 |
| US10167543B2 (en) | 2015-08-07 | 2019-01-01 | Fujikura Ltd. | Method for manufacturing optical fiber preform |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0480860B2 (enrdf_load_stackoverflow) | 1992-12-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |