JPS60254743A - 半導体チツプの位置検出方法 - Google Patents

半導体チツプの位置検出方法

Info

Publication number
JPS60254743A
JPS60254743A JP11125584A JP11125584A JPS60254743A JP S60254743 A JPS60254743 A JP S60254743A JP 11125584 A JP11125584 A JP 11125584A JP 11125584 A JP11125584 A JP 11125584A JP S60254743 A JPS60254743 A JP S60254743A
Authority
JP
Japan
Prior art keywords
semiconductor chip
cell group
cell
cell groups
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11125584A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0211018B2 (enrdf_load_stackoverflow
Inventor
Toshio Murata
利雄 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11125584A priority Critical patent/JPS60254743A/ja
Publication of JPS60254743A publication Critical patent/JPS60254743A/ja
Publication of JPH0211018B2 publication Critical patent/JPH0211018B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Control Of Position Or Direction (AREA)
JP11125584A 1984-05-31 1984-05-31 半導体チツプの位置検出方法 Granted JPS60254743A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11125584A JPS60254743A (ja) 1984-05-31 1984-05-31 半導体チツプの位置検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11125584A JPS60254743A (ja) 1984-05-31 1984-05-31 半導体チツプの位置検出方法

Publications (2)

Publication Number Publication Date
JPS60254743A true JPS60254743A (ja) 1985-12-16
JPH0211018B2 JPH0211018B2 (enrdf_load_stackoverflow) 1990-03-12

Family

ID=14556546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11125584A Granted JPS60254743A (ja) 1984-05-31 1984-05-31 半導体チツプの位置検出方法

Country Status (1)

Country Link
JP (1) JPS60254743A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62232137A (ja) * 1986-04-01 1987-10-12 Canon Inc 位置合せ方法
JPS63196056A (ja) * 1987-02-10 1988-08-15 Mitsubishi Electric Corp 半導体組立装置
JPS63204153A (ja) * 1987-02-19 1988-08-23 Tokyo Electron Ltd プロ−ブ装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62232137A (ja) * 1986-04-01 1987-10-12 Canon Inc 位置合せ方法
JPS63196056A (ja) * 1987-02-10 1988-08-15 Mitsubishi Electric Corp 半導体組立装置
JPS63204153A (ja) * 1987-02-19 1988-08-23 Tokyo Electron Ltd プロ−ブ装置

Also Published As

Publication number Publication date
JPH0211018B2 (enrdf_load_stackoverflow) 1990-03-12

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