JPS60248259A - 樹脂膜形成方法 - Google Patents

樹脂膜形成方法

Info

Publication number
JPS60248259A
JPS60248259A JP59105051A JP10505184A JPS60248259A JP S60248259 A JPS60248259 A JP S60248259A JP 59105051 A JP59105051 A JP 59105051A JP 10505184 A JP10505184 A JP 10505184A JP S60248259 A JPS60248259 A JP S60248259A
Authority
JP
Japan
Prior art keywords
plate
substrate
resin film
shaped substrate
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59105051A
Other languages
English (en)
Japanese (ja)
Other versions
JPH058070B2 (enExample
Inventor
Yoshiteru Namoto
名本　吉輝
Kiyoharu Yamashita
清春 山下
Keizaburo Kuramasu
敬三郎 倉増
Masaji Arai
荒井　正自
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59105051A priority Critical patent/JPS60248259A/ja
Publication of JPS60248259A publication Critical patent/JPS60248259A/ja
Publication of JPH058070B2 publication Critical patent/JPH058070B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
JP59105051A 1984-05-23 1984-05-23 樹脂膜形成方法 Granted JPS60248259A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59105051A JPS60248259A (ja) 1984-05-23 1984-05-23 樹脂膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59105051A JPS60248259A (ja) 1984-05-23 1984-05-23 樹脂膜形成方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2276975A Division JPH03157159A (ja) 1990-10-15 1990-10-15 スピンナー装置
JP2276974A Division JPH03170933A (ja) 1990-10-15 1990-10-15 樹脂膜形成用板状基板

Publications (2)

Publication Number Publication Date
JPS60248259A true JPS60248259A (ja) 1985-12-07
JPH058070B2 JPH058070B2 (enExample) 1993-02-01

Family

ID=14397186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59105051A Granted JPS60248259A (ja) 1984-05-23 1984-05-23 樹脂膜形成方法

Country Status (1)

Country Link
JP (1) JPS60248259A (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5223140A (en) * 1975-08-14 1977-02-21 Toshiba Corp Method for the simultaneous coating of both sides of plates
JPS5246903A (en) * 1975-10-08 1977-04-14 Mitsubishi Electric Corp Rotary coating apparatus
JPS56112724A (en) * 1980-02-09 1981-09-05 Nippon Kogaku Kk <Nikon> Spinner head
JPS5888068A (ja) * 1981-11-19 1983-05-26 Fujitsu Ltd 薄膜塗布装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5223140A (en) * 1975-08-14 1977-02-21 Toshiba Corp Method for the simultaneous coating of both sides of plates
JPS5246903A (en) * 1975-10-08 1977-04-14 Mitsubishi Electric Corp Rotary coating apparatus
JPS56112724A (en) * 1980-02-09 1981-09-05 Nippon Kogaku Kk <Nikon> Spinner head
JPS5888068A (ja) * 1981-11-19 1983-05-26 Fujitsu Ltd 薄膜塗布装置

Also Published As

Publication number Publication date
JPH058070B2 (enExample) 1993-02-01

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