JPH0470953B2 - - Google Patents
Info
- Publication number
- JPH0470953B2 JPH0470953B2 JP22473383A JP22473383A JPH0470953B2 JP H0470953 B2 JPH0470953 B2 JP H0470953B2 JP 22473383 A JP22473383 A JP 22473383A JP 22473383 A JP22473383 A JP 22473383A JP H0470953 B2 JPH0470953 B2 JP H0470953B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- substrate
- resin film
- shaped substrate
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 84
- 239000011347 resin Substances 0.000 claims description 61
- 229920005989 resin Polymers 0.000 claims description 61
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58224733A JPS60143869A (ja) | 1983-11-29 | 1983-11-29 | 樹脂膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58224733A JPS60143869A (ja) | 1983-11-29 | 1983-11-29 | 樹脂膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60143869A JPS60143869A (ja) | 1985-07-30 |
| JPH0470953B2 true JPH0470953B2 (enExample) | 1992-11-12 |
Family
ID=16818385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58224733A Granted JPS60143869A (ja) | 1983-11-29 | 1983-11-29 | 樹脂膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60143869A (enExample) |
-
1983
- 1983-11-29 JP JP58224733A patent/JPS60143869A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60143869A (ja) | 1985-07-30 |
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