JPS60143869A - 樹脂膜形成装置 - Google Patents

樹脂膜形成装置

Info

Publication number
JPS60143869A
JPS60143869A JP58224733A JP22473383A JPS60143869A JP S60143869 A JPS60143869 A JP S60143869A JP 58224733 A JP58224733 A JP 58224733A JP 22473383 A JP22473383 A JP 22473383A JP S60143869 A JPS60143869 A JP S60143869A
Authority
JP
Japan
Prior art keywords
substrate
resin film
plate
shaped substrate
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58224733A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0470953B2 (enExample
Inventor
Yoshiteru Namoto
名本　吉輝
Kiyoharu Yamashita
清春 山下
Keizaburo Kuramasu
敬三郎 倉増
Masaji Arai
荒井　正自
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58224733A priority Critical patent/JPS60143869A/ja
Publication of JPS60143869A publication Critical patent/JPS60143869A/ja
Publication of JPH0470953B2 publication Critical patent/JPH0470953B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
JP58224733A 1983-11-29 1983-11-29 樹脂膜形成装置 Granted JPS60143869A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58224733A JPS60143869A (ja) 1983-11-29 1983-11-29 樹脂膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58224733A JPS60143869A (ja) 1983-11-29 1983-11-29 樹脂膜形成装置

Publications (2)

Publication Number Publication Date
JPS60143869A true JPS60143869A (ja) 1985-07-30
JPH0470953B2 JPH0470953B2 (enExample) 1992-11-12

Family

ID=16818385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58224733A Granted JPS60143869A (ja) 1983-11-29 1983-11-29 樹脂膜形成装置

Country Status (1)

Country Link
JP (1) JPS60143869A (enExample)

Also Published As

Publication number Publication date
JPH0470953B2 (enExample) 1992-11-12

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