JPS60215799A - メツキ装置 - Google Patents

メツキ装置

Info

Publication number
JPS60215799A
JPS60215799A JP7060284A JP7060284A JPS60215799A JP S60215799 A JPS60215799 A JP S60215799A JP 7060284 A JP7060284 A JP 7060284A JP 7060284 A JP7060284 A JP 7060284A JP S60215799 A JPS60215799 A JP S60215799A
Authority
JP
Japan
Prior art keywords
wafer
plating
anode
holder
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7060284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0453960B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shigeki Matsumoto
茂樹 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal Mining Co Ltd
Original Assignee
Sumitomo Metal Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Mining Co Ltd filed Critical Sumitomo Metal Mining Co Ltd
Priority to JP7060284A priority Critical patent/JPS60215799A/ja
Publication of JPS60215799A publication Critical patent/JPS60215799A/ja
Publication of JPH0453960B2 publication Critical patent/JPH0453960B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
JP7060284A 1984-04-09 1984-04-09 メツキ装置 Granted JPS60215799A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7060284A JPS60215799A (ja) 1984-04-09 1984-04-09 メツキ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7060284A JPS60215799A (ja) 1984-04-09 1984-04-09 メツキ装置

Publications (2)

Publication Number Publication Date
JPS60215799A true JPS60215799A (ja) 1985-10-29
JPH0453960B2 JPH0453960B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-08-28

Family

ID=13436278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7060284A Granted JPS60215799A (ja) 1984-04-09 1984-04-09 メツキ装置

Country Status (1)

Country Link
JP (1) JPS60215799A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57174489A (en) * 1981-04-17 1982-10-27 Fujisen Shokai:Kk Plating device for small articles
JPS58135473U (ja) * 1982-03-04 1983-09-12 コニカ株式会社 電解処理装置
JPS59205500A (ja) * 1983-05-06 1984-11-21 Sansen Kikai Kogyo Kk 表面処理装置
JPS60234975A (ja) * 1984-05-04 1985-11-21 Dainippon Screen Mfg Co Ltd 板状物の浸漬処理方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57174489A (en) * 1981-04-17 1982-10-27 Fujisen Shokai:Kk Plating device for small articles
JPS58135473U (ja) * 1982-03-04 1983-09-12 コニカ株式会社 電解処理装置
JPS59205500A (ja) * 1983-05-06 1984-11-21 Sansen Kikai Kogyo Kk 表面処理装置
JPS60234975A (ja) * 1984-05-04 1985-11-21 Dainippon Screen Mfg Co Ltd 板状物の浸漬処理方法

Also Published As

Publication number Publication date
JPH0453960B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-08-28

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees