JPS60214172A - 固体撮像装置 - Google Patents
固体撮像装置Info
- Publication number
- JPS60214172A JPS60214172A JP59070446A JP7044684A JPS60214172A JP S60214172 A JPS60214172 A JP S60214172A JP 59070446 A JP59070446 A JP 59070446A JP 7044684 A JP7044684 A JP 7044684A JP S60214172 A JPS60214172 A JP S60214172A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- solid
- transparent electrode
- photosensitive
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims abstract description 16
- 238000006243 chemical reaction Methods 0.000 claims abstract description 6
- 239000000969 carrier Substances 0.000 claims description 15
- 239000012535 impurity Substances 0.000 claims description 13
- 238000003384 imaging method Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 abstract description 29
- 238000009413 insulation Methods 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 28
- 230000002265 prevention Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59070446A JPS60214172A (ja) | 1984-04-09 | 1984-04-09 | 固体撮像装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59070446A JPS60214172A (ja) | 1984-04-09 | 1984-04-09 | 固体撮像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60214172A true JPS60214172A (ja) | 1985-10-26 |
| JPH0135546B2 JPH0135546B2 (enrdf_load_stackoverflow) | 1989-07-26 |
Family
ID=13431728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59070446A Granted JPS60214172A (ja) | 1984-04-09 | 1984-04-09 | 固体撮像装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60214172A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63122266A (ja) * | 1986-11-12 | 1988-05-26 | Hitachi Ltd | 固体撮像素子 |
| JPH01268164A (ja) * | 1988-04-20 | 1989-10-25 | Toshiba Corp | 固体撮像装置 |
| JPH02218162A (ja) * | 1989-02-20 | 1990-08-30 | Nec Corp | 固体撮像素子 |
| JPH11121729A (ja) * | 1997-08-20 | 1999-04-30 | Internatl Business Mach Corp <Ibm> | バンドギャップ設計型アクティブ・ピクセル・セル |
| JP2005093549A (ja) * | 2003-09-12 | 2005-04-07 | Seiko Instruments Inc | 光電変換装置及びイメージセンサーｉｃ |
-
1984
- 1984-04-09 JP JP59070446A patent/JPS60214172A/ja active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63122266A (ja) * | 1986-11-12 | 1988-05-26 | Hitachi Ltd | 固体撮像素子 |
| JPH01268164A (ja) * | 1988-04-20 | 1989-10-25 | Toshiba Corp | 固体撮像装置 |
| JPH02218162A (ja) * | 1989-02-20 | 1990-08-30 | Nec Corp | 固体撮像素子 |
| JPH11121729A (ja) * | 1997-08-20 | 1999-04-30 | Internatl Business Mach Corp <Ibm> | バンドギャップ設計型アクティブ・ピクセル・セル |
| US6278102B1 (en) | 1997-08-20 | 2001-08-21 | International Business Machines Corporation | Method of detecting electromagnetic radiation with bandgap engineered active pixel cell design |
| JP2005093549A (ja) * | 2003-09-12 | 2005-04-07 | Seiko Instruments Inc | 光電変換装置及びイメージセンサーｉｃ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0135546B2 (enrdf_load_stackoverflow) | 1989-07-26 |
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