JPS60208853A - 半導体立体回路素子の製造方法 - Google Patents

半導体立体回路素子の製造方法

Info

Publication number
JPS60208853A
JPS60208853A JP59065160A JP6516084A JPS60208853A JP S60208853 A JPS60208853 A JP S60208853A JP 59065160 A JP59065160 A JP 59065160A JP 6516084 A JP6516084 A JP 6516084A JP S60208853 A JPS60208853 A JP S60208853A
Authority
JP
Japan
Prior art keywords
film
silicon
single crystal
circuit element
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59065160A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0114710B2 (enrdf_load_stackoverflow
Inventor
Takao Hashimoto
孝男 橋本
Isao Nakano
中野　勇男
Hiroyuki Aoe
青江　弘行
Takashi Nakakado
中門　孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP59065160A priority Critical patent/JPS60208853A/ja
Publication of JPS60208853A publication Critical patent/JPS60208853A/ja
Publication of JPH0114710B2 publication Critical patent/JPH0114710B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices
JP59065160A 1984-04-03 1984-04-03 半導体立体回路素子の製造方法 Granted JPS60208853A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59065160A JPS60208853A (ja) 1984-04-03 1984-04-03 半導体立体回路素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59065160A JPS60208853A (ja) 1984-04-03 1984-04-03 半導体立体回路素子の製造方法

Publications (2)

Publication Number Publication Date
JPS60208853A true JPS60208853A (ja) 1985-10-21
JPH0114710B2 JPH0114710B2 (enrdf_load_stackoverflow) 1989-03-14

Family

ID=13278848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59065160A Granted JPS60208853A (ja) 1984-04-03 1984-04-03 半導体立体回路素子の製造方法

Country Status (1)

Country Link
JP (1) JPS60208853A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0114710B2 (enrdf_load_stackoverflow) 1989-03-14

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Legal Events

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