JPS60208756A - 転写方法 - Google Patents

転写方法

Info

Publication number
JPS60208756A
JPS60208756A JP59065260A JP6526084A JPS60208756A JP S60208756 A JPS60208756 A JP S60208756A JP 59065260 A JP59065260 A JP 59065260A JP 6526084 A JP6526084 A JP 6526084A JP S60208756 A JPS60208756 A JP S60208756A
Authority
JP
Japan
Prior art keywords
alignment
exposure
light
wafer
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59065260A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0574208B2 (enExample
Inventor
Masahiko Okunuki
昌彦 奥貫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59065260A priority Critical patent/JPS60208756A/ja
Publication of JPS60208756A publication Critical patent/JPS60208756A/ja
Publication of JPH0574208B2 publication Critical patent/JPH0574208B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59065260A 1984-04-03 1984-04-03 転写方法 Granted JPS60208756A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59065260A JPS60208756A (ja) 1984-04-03 1984-04-03 転写方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59065260A JPS60208756A (ja) 1984-04-03 1984-04-03 転写方法

Publications (2)

Publication Number Publication Date
JPS60208756A true JPS60208756A (ja) 1985-10-21
JPH0574208B2 JPH0574208B2 (enExample) 1993-10-18

Family

ID=13281764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59065260A Granted JPS60208756A (ja) 1984-04-03 1984-04-03 転写方法

Country Status (1)

Country Link
JP (1) JPS60208756A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7651722B2 (en) * 2001-06-12 2010-01-26 Sony Corporation Apparatus and method for manufacturing an organic electroluminescence display

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057778A (enExample) * 1973-09-17 1975-05-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057778A (enExample) * 1973-09-17 1975-05-20

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7651722B2 (en) * 2001-06-12 2010-01-26 Sony Corporation Apparatus and method for manufacturing an organic electroluminescence display
US8034178B2 (en) 2001-06-12 2011-10-11 Sony Corporation Apparatus and method for manufacturing an organic electroluminescence display

Also Published As

Publication number Publication date
JPH0574208B2 (enExample) 1993-10-18

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