JPS60197960A - 光メモリ素子の製造方法 - Google Patents

光メモリ素子の製造方法

Info

Publication number
JPS60197960A
JPS60197960A JP5384384A JP5384384A JPS60197960A JP S60197960 A JPS60197960 A JP S60197960A JP 5384384 A JP5384384 A JP 5384384A JP 5384384 A JP5384384 A JP 5384384A JP S60197960 A JPS60197960 A JP S60197960A
Authority
JP
Japan
Prior art keywords
film
glass substrate
mask
guide
mask plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5384384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0585972B2 (enrdf_load_html_response
Inventor
Kenji Oota
賢司 太田
Toshihisa Deguchi
出口　敏久
Akira Takahashi
明 高橋
Tetsuya Inui
哲也 乾
Junji Hirokane
順司 広兼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP5384384A priority Critical patent/JPS60197960A/ja
Priority to DE8585102922T priority patent/DE3583754D1/de
Priority to EP85102922A priority patent/EP0155000B1/en
Priority to CA000476648A priority patent/CA1225467A/en
Publication of JPS60197960A publication Critical patent/JPS60197960A/ja
Priority to US07/017,456 priority patent/US4778747A/en
Publication of JPH0585972B2 publication Critical patent/JPH0585972B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP5384384A 1984-03-16 1984-03-19 光メモリ素子の製造方法 Granted JPS60197960A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP5384384A JPS60197960A (ja) 1984-03-19 1984-03-19 光メモリ素子の製造方法
DE8585102922T DE3583754D1 (de) 1984-03-16 1985-03-14 Verfahren zur herstellung eines optischen speicherelements.
EP85102922A EP0155000B1 (en) 1984-03-16 1985-03-14 Method of manufacturing optical memory element
CA000476648A CA1225467A (en) 1984-03-16 1985-03-15 Method of manufacturing optical memory element
US07/017,456 US4778747A (en) 1984-03-16 1987-02-24 Method of manufacturing optical memory element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5384384A JPS60197960A (ja) 1984-03-19 1984-03-19 光メモリ素子の製造方法

Publications (2)

Publication Number Publication Date
JPS60197960A true JPS60197960A (ja) 1985-10-07
JPH0585972B2 JPH0585972B2 (enrdf_load_html_response) 1993-12-09

Family

ID=12954056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5384384A Granted JPS60197960A (ja) 1984-03-16 1984-03-19 光メモリ素子の製造方法

Country Status (1)

Country Link
JP (1) JPS60197960A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5128922A (en) * 1987-09-29 1992-07-07 Sharp Kabushiki Kaisha Optical disk with glass substrate and method of producing same
CN104668894A (zh) * 2013-12-03 2015-06-03 宁波江丰电子材料股份有限公司 悬浮掩膜板的制作方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529353A (en) * 1975-07-11 1977-01-24 Matsushita Electric Ind Co Ltd Solid-state oscillator
JPS5477105A (en) * 1977-12-01 1979-06-20 Pioneer Electronic Corp Method of producing optical signal recording carrier
JPS5532250A (en) * 1978-08-25 1980-03-06 Matsushita Electric Ind Co Ltd Duplicating method for fine pattern
JPS57189893A (en) * 1981-05-20 1982-11-22 Fuji Photo Film Co Ltd Duplication of optical information

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529353A (en) * 1975-07-11 1977-01-24 Matsushita Electric Ind Co Ltd Solid-state oscillator
JPS5477105A (en) * 1977-12-01 1979-06-20 Pioneer Electronic Corp Method of producing optical signal recording carrier
JPS5532250A (en) * 1978-08-25 1980-03-06 Matsushita Electric Ind Co Ltd Duplicating method for fine pattern
JPS57189893A (en) * 1981-05-20 1982-11-22 Fuji Photo Film Co Ltd Duplication of optical information

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5128922A (en) * 1987-09-29 1992-07-07 Sharp Kabushiki Kaisha Optical disk with glass substrate and method of producing same
CN104668894A (zh) * 2013-12-03 2015-06-03 宁波江丰电子材料股份有限公司 悬浮掩膜板的制作方法

Also Published As

Publication number Publication date
JPH0585972B2 (enrdf_load_html_response) 1993-12-09

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