JPS60190560A - モリブデンのデポジシヨン方法 - Google Patents

モリブデンのデポジシヨン方法

Info

Publication number
JPS60190560A
JPS60190560A JP4783284A JP4783284A JPS60190560A JP S60190560 A JPS60190560 A JP S60190560A JP 4783284 A JP4783284 A JP 4783284A JP 4783284 A JP4783284 A JP 4783284A JP S60190560 A JPS60190560 A JP S60190560A
Authority
JP
Japan
Prior art keywords
sample
argon
mof6
molybdenum
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4783284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543789B2 (enrdf_load_stackoverflow
Inventor
Eiji Igawa
英治 井川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4783284A priority Critical patent/JPS60190560A/ja
Publication of JPS60190560A publication Critical patent/JPS60190560A/ja
Publication of JPH0543789B2 publication Critical patent/JPH0543789B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using ion beam radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
    • C23C16/14—Deposition of only one other metal element

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP4783284A 1984-03-13 1984-03-13 モリブデンのデポジシヨン方法 Granted JPS60190560A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4783284A JPS60190560A (ja) 1984-03-13 1984-03-13 モリブデンのデポジシヨン方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4783284A JPS60190560A (ja) 1984-03-13 1984-03-13 モリブデンのデポジシヨン方法

Publications (2)

Publication Number Publication Date
JPS60190560A true JPS60190560A (ja) 1985-09-28
JPH0543789B2 JPH0543789B2 (enrdf_load_stackoverflow) 1993-07-02

Family

ID=12786325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4783284A Granted JPS60190560A (ja) 1984-03-13 1984-03-13 モリブデンのデポジシヨン方法

Country Status (1)

Country Link
JP (1) JPS60190560A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6324033A (ja) * 1986-07-16 1988-02-01 Nippon Kokan Kk <Nkk> 化学気相蒸着処理を利用した金属材の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6324033A (ja) * 1986-07-16 1988-02-01 Nippon Kokan Kk <Nkk> 化学気相蒸着処理を利用した金属材の製造方法

Also Published As

Publication number Publication date
JPH0543789B2 (enrdf_load_stackoverflow) 1993-07-02

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