JPS60189238A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS60189238A
JPS60189238A JP59044100A JP4410084A JPS60189238A JP S60189238 A JPS60189238 A JP S60189238A JP 59044100 A JP59044100 A JP 59044100A JP 4410084 A JP4410084 A JP 4410084A JP S60189238 A JPS60189238 A JP S60189238A
Authority
JP
Japan
Prior art keywords
substrate
porous silicon
pressure
oxide film
silicon oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59044100A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0312773B2 (https=
Inventor
Fumio Otoi
音居　文雄
Hironori Kitabayashi
北林　宥憲
Kenji Anzai
賢二 安西
Kazuo Imai
和雄 今井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Oki Electric Industry Co Ltd filed Critical Nippon Telegraph and Telephone Corp
Priority to JP59044100A priority Critical patent/JPS60189238A/ja
Publication of JPS60189238A publication Critical patent/JPS60189238A/ja
Publication of JPH0312773B2 publication Critical patent/JPH0312773B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment

Landscapes

  • Element Separation (AREA)
  • Formation Of Insulating Films (AREA)
JP59044100A 1984-03-09 1984-03-09 半導体装置の製造方法 Granted JPS60189238A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59044100A JPS60189238A (ja) 1984-03-09 1984-03-09 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59044100A JPS60189238A (ja) 1984-03-09 1984-03-09 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60189238A true JPS60189238A (ja) 1985-09-26
JPH0312773B2 JPH0312773B2 (https=) 1991-02-21

Family

ID=12682193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59044100A Granted JPS60189238A (ja) 1984-03-09 1984-03-09 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60189238A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02189920A (ja) * 1989-01-18 1990-07-25 Nec Corp 酸化膜の形成方法及び酸化装置
JPH0438985U (https=) * 1990-07-31 1992-04-02

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59144149A (ja) * 1983-02-08 1984-08-18 Toko Inc 誘電体分離基板の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59144149A (ja) * 1983-02-08 1984-08-18 Toko Inc 誘電体分離基板の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02189920A (ja) * 1989-01-18 1990-07-25 Nec Corp 酸化膜の形成方法及び酸化装置
JPH0438985U (https=) * 1990-07-31 1992-04-02

Also Published As

Publication number Publication date
JPH0312773B2 (https=) 1991-02-21

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