JPS60186406A - アルフア型窒化けい素の連続的製造方法 - Google Patents

アルフア型窒化けい素の連続的製造方法

Info

Publication number
JPS60186406A
JPS60186406A JP4069184A JP4069184A JPS60186406A JP S60186406 A JPS60186406 A JP S60186406A JP 4069184 A JP4069184 A JP 4069184A JP 4069184 A JP4069184 A JP 4069184A JP S60186406 A JPS60186406 A JP S60186406A
Authority
JP
Japan
Prior art keywords
furnace
silicon nitride
tunnel furnace
metal silicon
alpha type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4069184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0218284B2 (cg-RX-API-DMAC7.html
Inventor
Mitsuo Umemura
梅村　光雄
Yasushi Matsudaira
靖 松平
Yoshihiro Kubota
芳宏 久保田
Toshimi Kobayashi
小林　利美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP4069184A priority Critical patent/JPS60186406A/ja
Publication of JPS60186406A publication Critical patent/JPS60186406A/ja
Publication of JPH0218284B2 publication Critical patent/JPH0218284B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682—Preparation by direct nitridation of silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
JP4069184A 1984-03-03 1984-03-03 アルフア型窒化けい素の連続的製造方法 Granted JPS60186406A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4069184A JPS60186406A (ja) 1984-03-03 1984-03-03 アルフア型窒化けい素の連続的製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4069184A JPS60186406A (ja) 1984-03-03 1984-03-03 アルフア型窒化けい素の連続的製造方法

Publications (2)

Publication Number Publication Date
JPS60186406A true JPS60186406A (ja) 1985-09-21
JPH0218284B2 JPH0218284B2 (cg-RX-API-DMAC7.html) 1990-04-25

Family

ID=12587575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4069184A Granted JPS60186406A (ja) 1984-03-03 1984-03-03 アルフア型窒化けい素の連続的製造方法

Country Status (1)

Country Link
JP (1) JPS60186406A (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63147807A (ja) * 1986-12-11 1988-06-20 Shin Etsu Chem Co Ltd 高α型窒化けい素の製造方法
US5232677A (en) * 1990-01-31 1993-08-03 Shin-Etsu Chemical Co., Ltd. Preparation of silicon nitride powder by partially nitriding in a fluidized bed and then completing nitridation in a moving bed
JP2023149329A (ja) * 2022-03-31 2023-10-13 株式会社プロテリアル 窒化珪素基板の製造方法、窒化珪素基板の製造装置および窒化珪素基板

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888107A (ja) * 1981-11-16 1983-05-26 Denki Kagaku Kogyo Kk α型窒化珪素の連続製造法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888107A (ja) * 1981-11-16 1983-05-26 Denki Kagaku Kogyo Kk α型窒化珪素の連続製造法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63147807A (ja) * 1986-12-11 1988-06-20 Shin Etsu Chem Co Ltd 高α型窒化けい素の製造方法
US5232677A (en) * 1990-01-31 1993-08-03 Shin-Etsu Chemical Co., Ltd. Preparation of silicon nitride powder by partially nitriding in a fluidized bed and then completing nitridation in a moving bed
JP2023149329A (ja) * 2022-03-31 2023-10-13 株式会社プロテリアル 窒化珪素基板の製造方法、窒化珪素基板の製造装置および窒化珪素基板

Also Published As

Publication number Publication date
JPH0218284B2 (cg-RX-API-DMAC7.html) 1990-04-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term