JPS60174865A - 薄膜形成用アルミニウム基材の表面処理方法 - Google Patents

薄膜形成用アルミニウム基材の表面処理方法

Info

Publication number
JPS60174865A
JPS60174865A JP2784184A JP2784184A JPS60174865A JP S60174865 A JPS60174865 A JP S60174865A JP 2784184 A JP2784184 A JP 2784184A JP 2784184 A JP2784184 A JP 2784184A JP S60174865 A JPS60174865 A JP S60174865A
Authority
JP
Japan
Prior art keywords
base material
film
thin film
oxide film
aluminum base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2784184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0461070B2 (OSRAM
Inventor
Kenji Tsukamoto
塚本　建次
Yutaka Kato
豊 加藤
Eizo Isoyama
礒山　永三
Shigemi Tanimoto
谷本　繁美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Altemira Co Ltd
Original Assignee
Showa Aluminum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Aluminum Corp filed Critical Showa Aluminum Corp
Priority to JP2784184A priority Critical patent/JPS60174865A/ja
Publication of JPS60174865A publication Critical patent/JPS60174865A/ja
Publication of JPH0461070B2 publication Critical patent/JPH0461070B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising
    • C23C8/12—Oxidising using elemental oxygen or ozone

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Formation Of Insulating Films (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP2784184A 1984-02-15 1984-02-15 薄膜形成用アルミニウム基材の表面処理方法 Granted JPS60174865A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2784184A JPS60174865A (ja) 1984-02-15 1984-02-15 薄膜形成用アルミニウム基材の表面処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2784184A JPS60174865A (ja) 1984-02-15 1984-02-15 薄膜形成用アルミニウム基材の表面処理方法

Publications (2)

Publication Number Publication Date
JPS60174865A true JPS60174865A (ja) 1985-09-09
JPH0461070B2 JPH0461070B2 (OSRAM) 1992-09-29

Family

ID=12232139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2784184A Granted JPS60174865A (ja) 1984-02-15 1984-02-15 薄膜形成用アルミニウム基材の表面処理方法

Country Status (1)

Country Link
JP (1) JPS60174865A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6452088A (en) * 1987-08-24 1989-02-28 Tokyo Electron Ltd Method for surface-treating aluminum and aluminum alloy body
JPH0222664A (ja) * 1988-07-11 1990-01-25 Fuji Electric Co Ltd 電子写真感光体の製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57147644A (en) * 1981-03-10 1982-09-11 Ricoh Co Ltd Photoreceptor for electrophotography
JPS5811944A (ja) * 1981-07-16 1983-01-22 Ricoh Co Ltd 電子写真用感光体の製造方法
JPS5815239A (ja) * 1981-07-21 1983-01-28 Ricoh Co Ltd 半導体素子
JPS5877712A (ja) * 1981-11-04 1983-05-11 昭和アルミニウム株式会社 真空用アルミニウム製中空押出形材の製造法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57147644A (en) * 1981-03-10 1982-09-11 Ricoh Co Ltd Photoreceptor for electrophotography
JPS5811944A (ja) * 1981-07-16 1983-01-22 Ricoh Co Ltd 電子写真用感光体の製造方法
JPS5815239A (ja) * 1981-07-21 1983-01-28 Ricoh Co Ltd 半導体素子
JPS5877712A (ja) * 1981-11-04 1983-05-11 昭和アルミニウム株式会社 真空用アルミニウム製中空押出形材の製造法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6452088A (en) * 1987-08-24 1989-02-28 Tokyo Electron Ltd Method for surface-treating aluminum and aluminum alloy body
JPH0222664A (ja) * 1988-07-11 1990-01-25 Fuji Electric Co Ltd 電子写真感光体の製造方法

Also Published As

Publication number Publication date
JPH0461070B2 (OSRAM) 1992-09-29

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