JPS60168116A - 反射光学系 - Google Patents

反射光学系

Info

Publication number
JPS60168116A
JPS60168116A JP2461384A JP2461384A JPS60168116A JP S60168116 A JPS60168116 A JP S60168116A JP 2461384 A JP2461384 A JP 2461384A JP 2461384 A JP2461384 A JP 2461384A JP S60168116 A JPS60168116 A JP S60168116A
Authority
JP
Japan
Prior art keywords
optical member
optical
aspherical
reflective
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2461384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0533369B2 (enrdf_load_stackoverflow
Inventor
Takamasa Hirose
広瀬　隆昌
Akiyoshi Suzuki
章義 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2461384A priority Critical patent/JPS60168116A/ja
Publication of JPS60168116A publication Critical patent/JPS60168116A/ja
Publication of JPH0533369B2 publication Critical patent/JPH0533369B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0892—Catadioptric systems specially adapted for the UV
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008—Systems specially adapted to form image relays or chained systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0812—Catadioptric systems using two curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
JP2461384A 1984-02-13 1984-02-13 反射光学系 Granted JPS60168116A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2461384A JPS60168116A (ja) 1984-02-13 1984-02-13 反射光学系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2461384A JPS60168116A (ja) 1984-02-13 1984-02-13 反射光学系

Publications (2)

Publication Number Publication Date
JPS60168116A true JPS60168116A (ja) 1985-08-31
JPH0533369B2 JPH0533369B2 (enrdf_load_stackoverflow) 1993-05-19

Family

ID=12142995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2461384A Granted JPS60168116A (ja) 1984-02-13 1984-02-13 反射光学系

Country Status (1)

Country Link
JP (1) JPS60168116A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6829420B2 (en) 2000-06-06 2004-12-07 Asahi Glass Company, Limited Optical fiber cable including freely movable plastic optical fibers
JP2006276846A (ja) * 2005-03-03 2006-10-12 Nexans 堅固な緩衝を備えた光ファイバテープ心線
JP2008286888A (ja) * 2007-05-15 2008-11-27 Canon Inc 露光装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6829420B2 (en) 2000-06-06 2004-12-07 Asahi Glass Company, Limited Optical fiber cable including freely movable plastic optical fibers
JP2006276846A (ja) * 2005-03-03 2006-10-12 Nexans 堅固な緩衝を備えた光ファイバテープ心線
JP2008286888A (ja) * 2007-05-15 2008-11-27 Canon Inc 露光装置

Also Published As

Publication number Publication date
JPH0533369B2 (enrdf_load_stackoverflow) 1993-05-19

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term