JPS60165737A - 絶縁分離基板 - Google Patents

絶縁分離基板

Info

Publication number
JPS60165737A
JPS60165737A JP1994784A JP1994784A JPS60165737A JP S60165737 A JPS60165737 A JP S60165737A JP 1994784 A JP1994784 A JP 1994784A JP 1994784 A JP1994784 A JP 1994784A JP S60165737 A JPS60165737 A JP S60165737A
Authority
JP
Japan
Prior art keywords
silicon
substrate
curvature
region
polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1994784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0443419B2 (enrdf_load_stackoverflow
Inventor
Hironori Inoue
洋典 井上
Takaya Suzuki
誉也 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1994784A priority Critical patent/JPS60165737A/ja
Publication of JPS60165737A publication Critical patent/JPS60165737A/ja
Publication of JPH0443419B2 publication Critical patent/JPH0443419B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
JP1994784A 1984-02-08 1984-02-08 絶縁分離基板 Granted JPS60165737A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1994784A JPS60165737A (ja) 1984-02-08 1984-02-08 絶縁分離基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1994784A JPS60165737A (ja) 1984-02-08 1984-02-08 絶縁分離基板

Publications (2)

Publication Number Publication Date
JPS60165737A true JPS60165737A (ja) 1985-08-28
JPH0443419B2 JPH0443419B2 (enrdf_load_stackoverflow) 1992-07-16

Family

ID=12013394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1994784A Granted JPS60165737A (ja) 1984-02-08 1984-02-08 絶縁分離基板

Country Status (1)

Country Link
JP (1) JPS60165737A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4892842A (en) * 1987-10-29 1990-01-09 Tektronix, Inc. Method of treating an integrated circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4892842A (en) * 1987-10-29 1990-01-09 Tektronix, Inc. Method of treating an integrated circuit

Also Published As

Publication number Publication date
JPH0443419B2 (enrdf_load_stackoverflow) 1992-07-16

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