JPS6016441A - 半導体基板面の絶縁分離方法 - Google Patents

半導体基板面の絶縁分離方法

Info

Publication number
JPS6016441A
JPS6016441A JP58125302A JP12530283A JPS6016441A JP S6016441 A JPS6016441 A JP S6016441A JP 58125302 A JP58125302 A JP 58125302A JP 12530283 A JP12530283 A JP 12530283A JP S6016441 A JPS6016441 A JP S6016441A
Authority
JP
Japan
Prior art keywords
film
groove
isolation region
silicon
polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58125302A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6352466B2 (enExample
Inventor
Ichiro Matsuo
一郎 松尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electronics Corp
Priority to JP58125302A priority Critical patent/JPS6016441A/ja
Publication of JPS6016441A publication Critical patent/JPS6016441A/ja
Publication of JPS6352466B2 publication Critical patent/JPS6352466B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/041—
    • H10W10/40—

Landscapes

  • Element Separation (AREA)
  • Recrystallisation Techniques (AREA)
JP58125302A 1983-07-08 1983-07-08 半導体基板面の絶縁分離方法 Granted JPS6016441A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58125302A JPS6016441A (ja) 1983-07-08 1983-07-08 半導体基板面の絶縁分離方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58125302A JPS6016441A (ja) 1983-07-08 1983-07-08 半導体基板面の絶縁分離方法

Publications (2)

Publication Number Publication Date
JPS6016441A true JPS6016441A (ja) 1985-01-28
JPS6352466B2 JPS6352466B2 (enExample) 1988-10-19

Family

ID=14906719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58125302A Granted JPS6016441A (ja) 1983-07-08 1983-07-08 半導体基板面の絶縁分離方法

Country Status (1)

Country Link
JP (1) JPS6016441A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5541440A (en) * 1993-07-28 1996-07-30 Mitsubishi Denki Kabushiki Kaisha Isolation structure for semiconductor device
KR20200010221A (ko) * 2017-05-19 2020-01-30 쌩-고벵 글래스 프랑스 유리 시트를 파단하는 방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7396832B2 (ja) * 2019-06-19 2023-12-12 株式会社ブリヂストン ホースの残存寿命予測方法及びホースの残存寿命予測システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5541440A (en) * 1993-07-28 1996-07-30 Mitsubishi Denki Kabushiki Kaisha Isolation structure for semiconductor device
KR20200010221A (ko) * 2017-05-19 2020-01-30 쌩-고벵 글래스 프랑스 유리 시트를 파단하는 방법

Also Published As

Publication number Publication date
JPS6352466B2 (enExample) 1988-10-19

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