JPS6352466B2 - - Google Patents

Info

Publication number
JPS6352466B2
JPS6352466B2 JP58125302A JP12530283A JPS6352466B2 JP S6352466 B2 JPS6352466 B2 JP S6352466B2 JP 58125302 A JP58125302 A JP 58125302A JP 12530283 A JP12530283 A JP 12530283A JP S6352466 B2 JPS6352466 B2 JP S6352466B2
Authority
JP
Japan
Prior art keywords
film
silicon
oxide film
forming
silicon nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58125302A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6016441A (ja
Inventor
Ichiro Matsuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP58125302A priority Critical patent/JPS6016441A/ja
Publication of JPS6016441A publication Critical patent/JPS6016441A/ja
Publication of JPS6352466B2 publication Critical patent/JPS6352466B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/041—
    • H10W10/40—

Landscapes

  • Element Separation (AREA)
  • Recrystallisation Techniques (AREA)
JP58125302A 1983-07-08 1983-07-08 半導体基板面の絶縁分離方法 Granted JPS6016441A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58125302A JPS6016441A (ja) 1983-07-08 1983-07-08 半導体基板面の絶縁分離方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58125302A JPS6016441A (ja) 1983-07-08 1983-07-08 半導体基板面の絶縁分離方法

Publications (2)

Publication Number Publication Date
JPS6016441A JPS6016441A (ja) 1985-01-28
JPS6352466B2 true JPS6352466B2 (enExample) 1988-10-19

Family

ID=14906719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58125302A Granted JPS6016441A (ja) 1983-07-08 1983-07-08 半導体基板面の絶縁分離方法

Country Status (1)

Country Link
JP (1) JPS6016441A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12092552B2 (en) * 2019-06-19 2024-09-17 Bridgestone Corporation Hose remaining lifetime prediction method and hose remaining lifetime prediction system

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3324832B2 (ja) * 1993-07-28 2002-09-17 三菱電機株式会社 半導体装置およびその製造方法
FR3066487B1 (fr) * 2017-05-19 2021-12-10 Saint Gobain Procede de rompage d'une feuille de verre

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12092552B2 (en) * 2019-06-19 2024-09-17 Bridgestone Corporation Hose remaining lifetime prediction method and hose remaining lifetime prediction system

Also Published As

Publication number Publication date
JPS6016441A (ja) 1985-01-28

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