JPS60161630A - 半導体ペレツト位置決め装置 - Google Patents

半導体ペレツト位置決め装置

Info

Publication number
JPS60161630A
JPS60161630A JP1744384A JP1744384A JPS60161630A JP S60161630 A JPS60161630 A JP S60161630A JP 1744384 A JP1744384 A JP 1744384A JP 1744384 A JP1744384 A JP 1744384A JP S60161630 A JPS60161630 A JP S60161630A
Authority
JP
Japan
Prior art keywords
semiconductor pellet
stage
deviation
semiconductor
positioning device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1744384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH058574B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hitoshi Shirata
白田　仁志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Electronic Device Solutions Corp
Original Assignee
Toshiba Corp
Toshiba Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Microelectronics Corp filed Critical Toshiba Corp
Priority to JP1744384A priority Critical patent/JPS60161630A/ja
Publication of JPS60161630A publication Critical patent/JPS60161630A/ja
Publication of JPH058574B2 publication Critical patent/JPH058574B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Position Or Direction (AREA)
JP1744384A 1984-02-02 1984-02-02 半導体ペレツト位置決め装置 Granted JPS60161630A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1744384A JPS60161630A (ja) 1984-02-02 1984-02-02 半導体ペレツト位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1744384A JPS60161630A (ja) 1984-02-02 1984-02-02 半導体ペレツト位置決め装置

Publications (2)

Publication Number Publication Date
JPS60161630A true JPS60161630A (ja) 1985-08-23
JPH058574B2 JPH058574B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-02

Family

ID=11944165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1744384A Granted JPS60161630A (ja) 1984-02-02 1984-02-02 半導体ペレツト位置決め装置

Country Status (1)

Country Link
JP (1) JPS60161630A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6398782A (ja) * 1986-10-15 1988-04-30 Nichiden Mach Ltd 微小ワ−ク片の認識方法
JPS63196056A (ja) * 1987-02-10 1988-08-15 Mitsubishi Electric Corp 半導体組立装置
WO2001017005A1 (en) * 1999-08-27 2001-03-08 Matsushita Electric Industrial Co., Ltd. Method and apparatus for handling arranged part
WO2008095865A1 (de) * 2007-02-06 2008-08-14 Oerlikon Assembly Equipment Ag, Steinhausen Verfahern zur montage von halbleiterchips auf ein substrat
GB2525616A (en) * 2014-04-29 2015-11-04 Nissan Motor Mfg Uk Ltd Vehicle, striker assembly and damper

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS499171U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-04-26 1974-01-25
JPS57159246U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-03-30 1982-10-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS499171U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-04-26 1974-01-25
JPS57159246U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-03-30 1982-10-06

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6398782A (ja) * 1986-10-15 1988-04-30 Nichiden Mach Ltd 微小ワ−ク片の認識方法
JPS63196056A (ja) * 1987-02-10 1988-08-15 Mitsubishi Electric Corp 半導体組立装置
WO2001017005A1 (en) * 1999-08-27 2001-03-08 Matsushita Electric Industrial Co., Ltd. Method and apparatus for handling arranged part
US6830989B1 (en) 1999-08-27 2004-12-14 Matsushita Electric Industrial Co., Ltd. Method and apparatus for handling arrayed part
WO2008095865A1 (de) * 2007-02-06 2008-08-14 Oerlikon Assembly Equipment Ag, Steinhausen Verfahern zur montage von halbleiterchips auf ein substrat
GB2525616A (en) * 2014-04-29 2015-11-04 Nissan Motor Mfg Uk Ltd Vehicle, striker assembly and damper

Also Published As

Publication number Publication date
JPH058574B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-02

Similar Documents

Publication Publication Date Title
JP5808190B2 (ja) 硬質脆性板の周縁加工装置
US5070598A (en) Device for mounting electronic parts
US20090016857A1 (en) Substrate-replacing apparatus, substrate-processing apparatus, and substrate-inspecting apparatus
CN212229376U (zh) 一种柔性屏体弯折贴附机
JPS60161630A (ja) 半導体ペレツト位置決め装置
US5092031A (en) Method and apparatus for bonding external leads
JPH0452617B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP3596250B2 (ja) 電子部品実装方法
JP3129161B2 (ja) チップの実装装置および実装方法
JP3661564B2 (ja) 表示パネルの組立装置
JPH10173022A (ja) ウェハ搬送装置
JP3198801B2 (ja) 回路基板の搭載方法
JPH03268399A (ja) 電子部品装着装置
JPH0777312B2 (ja) 電子部品自動装着装置
JPS6262054B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS58142534A (ja) フイルムキヤリアボンデイング装置
JP2757022B2 (ja) マーキング方法及び装置
JP3959323B2 (ja) ペレットボンデイング装置
JPS6127652A (ja) ウエハ位置決め装置
JP2651685B2 (ja) ボンディング装置
JP2507364B2 (ja) シヤドウマスク構体の分離装置
JP3801055B2 (ja) ペレットボンディング方法および装置
JP2000353724A (ja) 基板の回転位置決め装置
JPS59205240A (ja) 自動組立装置
JPS59208849A (ja) 板状物の位置合わせ方法および装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term