JPS60160613A - 投影露光方法 - Google Patents

投影露光方法

Info

Publication number
JPS60160613A
JPS60160613A JP59015800A JP1580084A JPS60160613A JP S60160613 A JPS60160613 A JP S60160613A JP 59015800 A JP59015800 A JP 59015800A JP 1580084 A JP1580084 A JP 1580084A JP S60160613 A JPS60160613 A JP S60160613A
Authority
JP
Japan
Prior art keywords
pattern
detection
detected
exposed
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59015800A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0443407B2 (show.php
Inventor
Hideji Sugiyama
秀司 杉山
Shuji Shoda
正田　修二
Eiichi Yasukura
安蔵　栄一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Science Systems Ltd
Original Assignee
Hitachi Ltd
Hitachi Measurement Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Measurement Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP59015800A priority Critical patent/JPS60160613A/ja
Publication of JPS60160613A publication Critical patent/JPS60160613A/ja
Publication of JPH0443407B2 publication Critical patent/JPH0443407B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59015800A 1984-01-31 1984-01-31 投影露光方法 Granted JPS60160613A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59015800A JPS60160613A (ja) 1984-01-31 1984-01-31 投影露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59015800A JPS60160613A (ja) 1984-01-31 1984-01-31 投影露光方法

Publications (2)

Publication Number Publication Date
JPS60160613A true JPS60160613A (ja) 1985-08-22
JPH0443407B2 JPH0443407B2 (show.php) 1992-07-16

Family

ID=11898912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59015800A Granted JPS60160613A (ja) 1984-01-31 1984-01-31 投影露光方法

Country Status (1)

Country Link
JP (1) JPS60160613A (show.php)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6266631A (ja) * 1985-09-19 1987-03-26 Nippon Kogaku Kk <Nikon> ステツプ・アンド・リピ−ト露光装置
JPS62291133A (ja) * 1986-06-11 1987-12-17 Nikon Corp 位置合わせ方法
JPS63250120A (ja) * 1987-04-07 1988-10-18 Mitsubishi Electric Corp アライメント補正装置
JPH027511A (ja) * 1988-06-27 1990-01-11 Mitsubishi Electric Corp 露光装置
JPH07254558A (ja) * 1994-12-19 1995-10-03 Nikon Corp 位置合わせ方法
JPH08264433A (ja) * 1996-04-22 1996-10-11 Nikon Corp 回路パターン形成方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6266631A (ja) * 1985-09-19 1987-03-26 Nippon Kogaku Kk <Nikon> ステツプ・アンド・リピ−ト露光装置
JPS62291133A (ja) * 1986-06-11 1987-12-17 Nikon Corp 位置合わせ方法
JPS63250120A (ja) * 1987-04-07 1988-10-18 Mitsubishi Electric Corp アライメント補正装置
JPH027511A (ja) * 1988-06-27 1990-01-11 Mitsubishi Electric Corp 露光装置
JPH07254558A (ja) * 1994-12-19 1995-10-03 Nikon Corp 位置合わせ方法
JPH08264433A (ja) * 1996-04-22 1996-10-11 Nikon Corp 回路パターン形成方法

Also Published As

Publication number Publication date
JPH0443407B2 (show.php) 1992-07-16

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Legal Events

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