JPS60147175A - フォトセンサ - Google Patents

フォトセンサ

Info

Publication number
JPS60147175A
JPS60147175A JP59002581A JP258184A JPS60147175A JP S60147175 A JPS60147175 A JP S60147175A JP 59002581 A JP59002581 A JP 59002581A JP 258184 A JP258184 A JP 258184A JP S60147175 A JPS60147175 A JP S60147175A
Authority
JP
Japan
Prior art keywords
thickness
layer
glass substrate
borosilicate glass
silicon dioxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59002581A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334866B2 (enrdf_load_stackoverflow
Inventor
Nobuyuki Sekimura
関村　信行
Tatsumi Shoji
辰美 庄司
Teruhiko Furushima
古島　輝彦
Masaki Fukaya
深谷　正樹
Katsumi Nakagawa
克己 中川
Toshiyuki Komatsu
利行 小松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59002581A priority Critical patent/JPS60147175A/ja
Priority to US06/621,630 priority patent/US4667214A/en
Priority to DE19843423159 priority patent/DE3423159A1/de
Publication of JPS60147175A publication Critical patent/JPS60147175A/ja
Publication of JPH0334866B2 publication Critical patent/JPH0334866B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass

Landscapes

  • Light Receiving Elements (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP59002581A 1983-06-24 1984-01-12 フォトセンサ Granted JPS60147175A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59002581A JPS60147175A (ja) 1984-01-12 1984-01-12 フォトセンサ
US06/621,630 US4667214A (en) 1983-06-24 1984-06-18 Photosensor
DE19843423159 DE3423159A1 (de) 1983-06-24 1984-06-22 Fotosensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59002581A JPS60147175A (ja) 1984-01-12 1984-01-12 フォトセンサ

Publications (2)

Publication Number Publication Date
JPS60147175A true JPS60147175A (ja) 1985-08-03
JPH0334866B2 JPH0334866B2 (enrdf_load_stackoverflow) 1991-05-24

Family

ID=11533338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59002581A Granted JPS60147175A (ja) 1983-06-24 1984-01-12 フォトセンサ

Country Status (1)

Country Link
JP (1) JPS60147175A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58112375A (ja) * 1981-12-25 1983-07-04 Fuji Electric Corp Res & Dev Ltd 光起電力装置の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58112375A (ja) * 1981-12-25 1983-07-04 Fuji Electric Corp Res & Dev Ltd 光起電力装置の製造方法

Also Published As

Publication number Publication date
JPH0334866B2 (enrdf_load_stackoverflow) 1991-05-24

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