JPH0482066B2 - - Google Patents
Info
- Publication number
- JPH0482066B2 JPH0482066B2 JP60213453A JP21345385A JPH0482066B2 JP H0482066 B2 JPH0482066 B2 JP H0482066B2 JP 60213453 A JP60213453 A JP 60213453A JP 21345385 A JP21345385 A JP 21345385A JP H0482066 B2 JPH0482066 B2 JP H0482066B2
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric conversion
- film
- conversion film
- cds
- oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 claims description 18
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 16
- 239000001301 oxygen Substances 0.000 claims description 16
- 229910052760 oxygen Inorganic materials 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 14
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 229910004613 CdTe Inorganic materials 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 239000000758 substrate Substances 0.000 description 7
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 238000001994 activation Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000009388 chemical precipitation Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
Landscapes
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60213453A JPS6272183A (ja) | 1985-09-25 | 1985-09-25 | 光電変換膜の製造方法 |
| US06/910,875 US4759951A (en) | 1985-09-25 | 1986-09-23 | Heat-treating Cd-containing photoelectric conversion film in the presence of a cadmium halide |
| DE19863632210 DE3632210A1 (de) | 1985-09-25 | 1986-09-23 | Verfahren zur herstellung eines photoelektrischen umwandlungsfilms |
| GB8622999A GB2183089B (en) | 1985-09-25 | 1986-09-24 | Process for producing photoelectric conversion film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60213453A JPS6272183A (ja) | 1985-09-25 | 1985-09-25 | 光電変換膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6272183A JPS6272183A (ja) | 1987-04-02 |
| JPH0482066B2 true JPH0482066B2 (enrdf_load_stackoverflow) | 1992-12-25 |
Family
ID=16639466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60213453A Granted JPS6272183A (ja) | 1985-09-25 | 1985-09-25 | 光電変換膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6272183A (enrdf_load_stackoverflow) |
-
1985
- 1985-09-25 JP JP60213453A patent/JPS6272183A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6272183A (ja) | 1987-04-02 |