JPS6013970U - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS6013970U
JPS6013970U JP10206983U JP10206983U JPS6013970U JP S6013970 U JPS6013970 U JP S6013970U JP 10206983 U JP10206983 U JP 10206983U JP 10206983 U JP10206983 U JP 10206983U JP S6013970 U JPS6013970 U JP S6013970U
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
growth equipment
reaction tube
susceptor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10206983U
Other languages
English (en)
Japanese (ja)
Other versions
JPS632442Y2 (enExample
Inventor
健 上條
紘 高野
小沢　晶
正男 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP10206983U priority Critical patent/JPS6013970U/ja
Publication of JPS6013970U publication Critical patent/JPS6013970U/ja
Application granted granted Critical
Publication of JPS632442Y2 publication Critical patent/JPS632442Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP10206983U 1983-07-02 1983-07-02 気相成長装置 Granted JPS6013970U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10206983U JPS6013970U (ja) 1983-07-02 1983-07-02 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10206983U JPS6013970U (ja) 1983-07-02 1983-07-02 気相成長装置

Publications (2)

Publication Number Publication Date
JPS6013970U true JPS6013970U (ja) 1985-01-30
JPS632442Y2 JPS632442Y2 (enExample) 1988-01-21

Family

ID=30240761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10206983U Granted JPS6013970U (ja) 1983-07-02 1983-07-02 気相成長装置

Country Status (1)

Country Link
JP (1) JPS6013970U (enExample)

Also Published As

Publication number Publication date
JPS632442Y2 (enExample) 1988-01-21

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