JPS60138977A - 半導体形静電容量式圧力センサ - Google Patents

半導体形静電容量式圧力センサ

Info

Publication number
JPS60138977A
JPS60138977A JP24478483A JP24478483A JPS60138977A JP S60138977 A JPS60138977 A JP S60138977A JP 24478483 A JP24478483 A JP 24478483A JP 24478483 A JP24478483 A JP 24478483A JP S60138977 A JPS60138977 A JP S60138977A
Authority
JP
Japan
Prior art keywords
layer
metal layer
diaphragm
pressure sensor
diaphragm part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24478483A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0481868B2 (enrdf_load_stackoverflow
Inventor
Kimihiro Nakamura
公弘 中村
Mitsuru Tamai
満 玉井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP24478483A priority Critical patent/JPS60138977A/ja
Priority to DE19843445775 priority patent/DE3445775C2/de
Publication of JPS60138977A publication Critical patent/JPS60138977A/ja
Publication of JPH0481868B2 publication Critical patent/JPH0481868B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP24478483A 1983-12-27 1983-12-27 半導体形静電容量式圧力センサ Granted JPS60138977A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP24478483A JPS60138977A (ja) 1983-12-27 1983-12-27 半導体形静電容量式圧力センサ
DE19843445775 DE3445775C2 (de) 1983-12-27 1984-12-12 Kapazitiver Halbleiterdruckaufnehmer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24478483A JPS60138977A (ja) 1983-12-27 1983-12-27 半導体形静電容量式圧力センサ

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP18650692A Division JPH0697699B2 (ja) 1992-07-14 1992-07-14 半導体形静電容量式圧力センサ
JP18650592A Division JP2501722B2 (ja) 1992-07-14 1992-07-14 半導体形静電容量式圧力センサ

Publications (2)

Publication Number Publication Date
JPS60138977A true JPS60138977A (ja) 1985-07-23
JPH0481868B2 JPH0481868B2 (enrdf_load_stackoverflow) 1992-12-25

Family

ID=17123869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24478483A Granted JPS60138977A (ja) 1983-12-27 1983-12-27 半導体形静電容量式圧力センサ

Country Status (2)

Country Link
JP (1) JPS60138977A (enrdf_load_stackoverflow)
DE (1) DE3445775C2 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62156879A (ja) * 1985-12-28 1987-07-11 Nec Corp 半導体圧力検知装置の製造方法
JPH04143628A (ja) * 1990-10-05 1992-05-18 Yamatake Honeywell Co Ltd 静電容量式圧力センサ
US5313836A (en) * 1989-07-17 1994-05-24 Nippondenso Co., Ltd. Semiconductor sensor for accelerometer
US5520051A (en) * 1989-09-27 1996-05-28 Nippondenso Co., Ltd. Strain sensing device
JP2009041182A (ja) * 2007-08-06 2009-02-26 Toyota Auto Body Co Ltd スライドドア装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
DE3635462A1 (de) * 1985-10-21 1987-04-23 Sharp Kk Feldeffekt-drucksensor
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
FI115487B (fi) 2004-05-03 2005-05-13 Vti Technologies Oy Menetelmä kapasitiivisen paineanturin valmistamiseksi ja kapasitiivinen paineanturi

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55115370A (en) * 1979-02-27 1980-09-05 Fujitsu Ltd Electrostatic type converter
JPS5764978A (en) * 1980-10-03 1982-04-20 Ibm Capacitive pressure transducer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55115370A (en) * 1979-02-27 1980-09-05 Fujitsu Ltd Electrostatic type converter
JPS5764978A (en) * 1980-10-03 1982-04-20 Ibm Capacitive pressure transducer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62156879A (ja) * 1985-12-28 1987-07-11 Nec Corp 半導体圧力検知装置の製造方法
US5313836A (en) * 1989-07-17 1994-05-24 Nippondenso Co., Ltd. Semiconductor sensor for accelerometer
US5520051A (en) * 1989-09-27 1996-05-28 Nippondenso Co., Ltd. Strain sensing device
JPH04143628A (ja) * 1990-10-05 1992-05-18 Yamatake Honeywell Co Ltd 静電容量式圧力センサ
JP2009041182A (ja) * 2007-08-06 2009-02-26 Toyota Auto Body Co Ltd スライドドア装置

Also Published As

Publication number Publication date
JPH0481868B2 (enrdf_load_stackoverflow) 1992-12-25
DE3445775C2 (de) 1994-02-03
DE3445775A1 (de) 1985-07-04

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