JPS60132676A - 回転する基板上に一様な厚さの膜を形成させる塗布装置 - Google Patents
回転する基板上に一様な厚さの膜を形成させる塗布装置Info
- Publication number
- JPS60132676A JPS60132676A JP24069883A JP24069883A JPS60132676A JP S60132676 A JPS60132676 A JP S60132676A JP 24069883 A JP24069883 A JP 24069883A JP 24069883 A JP24069883 A JP 24069883A JP S60132676 A JPS60132676 A JP S60132676A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- lid member
- lid
- space
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 title claims description 33
- 238000000576 coating method Methods 0.000 title claims description 33
- 239000000758 substrate Substances 0.000 claims abstract description 216
- 239000007788 liquid Substances 0.000 claims description 33
- 239000002904 solvent Substances 0.000 claims description 19
- 239000000470 constituent Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 abstract description 15
- 230000002093 peripheral effect Effects 0.000 abstract description 10
- 238000005553 drilling Methods 0.000 abstract description 2
- 239000011521 glass Substances 0.000 description 76
- 239000010408 film Substances 0.000 description 54
- 239000002861 polymer material Substances 0.000 description 19
- 239000010410 layer Substances 0.000 description 9
- 230000007423 decrease Effects 0.000 description 6
- 239000011247 coating layer Substances 0.000 description 4
- 238000007865 diluting Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002309 gasification Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24069883A JPS60132676A (ja) | 1983-12-20 | 1983-12-20 | 回転する基板上に一様な厚さの膜を形成させる塗布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24069883A JPS60132676A (ja) | 1983-12-20 | 1983-12-20 | 回転する基板上に一様な厚さの膜を形成させる塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60132676A true JPS60132676A (ja) | 1985-07-15 |
| JPS6231991B2 JPS6231991B2 (enrdf_load_stackoverflow) | 1987-07-11 |
Family
ID=17063366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24069883A Granted JPS60132676A (ja) | 1983-12-20 | 1983-12-20 | 回転する基板上に一様な厚さの膜を形成させる塗布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60132676A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS64737A (en) * | 1987-03-27 | 1989-01-05 | Toshiba Corp | Applicator for resist |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63305985A (ja) * | 1987-06-08 | 1988-12-13 | Matsushita Electric Ind Co Ltd | 再生装置付硬水軟水器 |
| JPS63305984A (ja) * | 1987-06-08 | 1988-12-13 | Matsushita Electric Ind Co Ltd | 再生装置付硬水軟水器 |
-
1983
- 1983-12-20 JP JP24069883A patent/JPS60132676A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS64737A (en) * | 1987-03-27 | 1989-01-05 | Toshiba Corp | Applicator for resist |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6231991B2 (enrdf_load_stackoverflow) | 1987-07-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |