JPS60132319A - 薄膜形成方法 - Google Patents

薄膜形成方法

Info

Publication number
JPS60132319A
JPS60132319A JP58240723A JP24072383A JPS60132319A JP S60132319 A JPS60132319 A JP S60132319A JP 58240723 A JP58240723 A JP 58240723A JP 24072383 A JP24072383 A JP 24072383A JP S60132319 A JPS60132319 A JP S60132319A
Authority
JP
Japan
Prior art keywords
substrate
thin film
target
film
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58240723A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0211011B2 (OSRAM
Inventor
Hisao Ito
久夫 伊藤
Yoshio Furuya
古屋　義夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP58240723A priority Critical patent/JPS60132319A/ja
Publication of JPS60132319A publication Critical patent/JPS60132319A/ja
Publication of JPH0211011B2 publication Critical patent/JPH0211011B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/22—

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Photovoltaic Devices (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP58240723A 1983-12-20 1983-12-20 薄膜形成方法 Granted JPS60132319A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58240723A JPS60132319A (ja) 1983-12-20 1983-12-20 薄膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58240723A JPS60132319A (ja) 1983-12-20 1983-12-20 薄膜形成方法

Publications (2)

Publication Number Publication Date
JPS60132319A true JPS60132319A (ja) 1985-07-15
JPH0211011B2 JPH0211011B2 (OSRAM) 1990-03-12

Family

ID=17063741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58240723A Granted JPS60132319A (ja) 1983-12-20 1983-12-20 薄膜形成方法

Country Status (1)

Country Link
JP (1) JPS60132319A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62216112A (ja) * 1986-03-11 1987-09-22 田崎　明 透明導電膜の製造方法
US5180476A (en) * 1990-02-27 1993-01-19 Nihon Shinku Gijutsu Kabushiki Kaisha Method for producing transparent conductive films

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5440073A (en) * 1977-09-05 1979-03-28 Matsushita Electric Ind Co Ltd Film forming method
JPS5616671A (en) * 1979-07-17 1981-02-17 Fujitsu Ltd Sputtering apparatus
JPS57114662A (en) * 1980-08-08 1982-07-16 Battelle Development Corp Cathode sputtering apparatus for detecting target drill hole
JPS58133376A (ja) * 1982-01-26 1983-08-09 マテリアルズ・リサ−チ・コ−ポレ−シヨン 反応性膜析出方法及び装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5440073A (en) * 1977-09-05 1979-03-28 Matsushita Electric Ind Co Ltd Film forming method
JPS5616671A (en) * 1979-07-17 1981-02-17 Fujitsu Ltd Sputtering apparatus
JPS57114662A (en) * 1980-08-08 1982-07-16 Battelle Development Corp Cathode sputtering apparatus for detecting target drill hole
JPS58133376A (ja) * 1982-01-26 1983-08-09 マテリアルズ・リサ−チ・コ−ポレ−シヨン 反応性膜析出方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62216112A (ja) * 1986-03-11 1987-09-22 田崎　明 透明導電膜の製造方法
US5180476A (en) * 1990-02-27 1993-01-19 Nihon Shinku Gijutsu Kabushiki Kaisha Method for producing transparent conductive films

Also Published As

Publication number Publication date
JPH0211011B2 (OSRAM) 1990-03-12

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