JPS6012703A - 厚膜型正特性半導体素子の製造方法 - Google Patents
厚膜型正特性半導体素子の製造方法Info
- Publication number
- JPS6012703A JPS6012703A JP12050583A JP12050583A JPS6012703A JP S6012703 A JPS6012703 A JP S6012703A JP 12050583 A JP12050583 A JP 12050583A JP 12050583 A JP12050583 A JP 12050583A JP S6012703 A JPS6012703 A JP S6012703A
- Authority
- JP
- Japan
- Prior art keywords
- thick film
- powder
- lasi
- semiconductor element
- positive temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 32
- 238000000034 method Methods 0.000 title claims description 10
- 239000000843 powder Substances 0.000 claims description 27
- 229910018250 LaSi Inorganic materials 0.000 claims description 14
- 229910018246 LaSi2 Inorganic materials 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 8
- 229910002113 barium titanate Inorganic materials 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000010304 firing Methods 0.000 claims description 5
- 239000010408 film Substances 0.000 description 18
- 239000011521 glass Substances 0.000 description 17
- 238000010438 heat treatment Methods 0.000 description 12
- 239000002482 conductive additive Substances 0.000 description 7
- 239000002245 particle Substances 0.000 description 4
- 230000035939 shock Effects 0.000 description 4
- 229910018251 LaSi 2 Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 2
- 229940088601 alpha-terpineol Drugs 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 235000020129 lassi Nutrition 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12050583A JPS6012703A (ja) | 1983-07-01 | 1983-07-01 | 厚膜型正特性半導体素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12050583A JPS6012703A (ja) | 1983-07-01 | 1983-07-01 | 厚膜型正特性半導体素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6012703A true JPS6012703A (ja) | 1985-01-23 |
| JPH04366B2 JPH04366B2 (enrdf_load_stackoverflow) | 1992-01-07 |
Family
ID=14787854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12050583A Granted JPS6012703A (ja) | 1983-07-01 | 1983-07-01 | 厚膜型正特性半導体素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6012703A (enrdf_load_stackoverflow) |
-
1983
- 1983-07-01 JP JP12050583A patent/JPS6012703A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04366B2 (enrdf_load_stackoverflow) | 1992-01-07 |
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