JPS6012187A - 洗浄方法及び装置 - Google Patents
洗浄方法及び装置Info
- Publication number
- JPS6012187A JPS6012187A JP12076083A JP12076083A JPS6012187A JP S6012187 A JPS6012187 A JP S6012187A JP 12076083 A JP12076083 A JP 12076083A JP 12076083 A JP12076083 A JP 12076083A JP S6012187 A JPS6012187 A JP S6012187A
- Authority
- JP
- Japan
- Prior art keywords
- solvent
- cleaning
- cleaning solvent
- cleaned
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 9
- 238000005406 washing Methods 0.000 title 1
- 238000004140 cleaning Methods 0.000 claims description 75
- 239000002904 solvent Substances 0.000 claims description 75
- 239000007921 spray Substances 0.000 claims description 15
- 238000009835 boiling Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 9
- 230000006835 compression Effects 0.000 claims description 6
- 238000007906 compression Methods 0.000 claims description 6
- 238000005507 spraying Methods 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 238000001816 cooling Methods 0.000 description 15
- 239000007788 liquid Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 4
- 238000004821 distillation Methods 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12076083A JPS6012187A (ja) | 1983-07-02 | 1983-07-02 | 洗浄方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12076083A JPS6012187A (ja) | 1983-07-02 | 1983-07-02 | 洗浄方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6012187A true JPS6012187A (ja) | 1985-01-22 |
| JPH0237232B2 JPH0237232B2 (enrdf_load_stackoverflow) | 1990-08-23 |
Family
ID=14794311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12076083A Granted JPS6012187A (ja) | 1983-07-02 | 1983-07-02 | 洗浄方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6012187A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03263831A (ja) * | 1990-03-14 | 1991-11-25 | Dan Clean Prod:Kk | スプレー洗浄装置 |
| JPH0551229A (ja) * | 1991-08-23 | 1993-03-02 | Bandou Kiko Kk | ガラス板の加工機械 |
| US5807166A (en) * | 1994-07-21 | 1998-09-15 | Bando Kiko Co., Ltd. | Glass-plate working machine |
| JP2011228385A (ja) * | 2010-04-16 | 2011-11-10 | Denso Corp | 洗浄乾燥方法および洗浄乾燥装置 |
| JP2013251548A (ja) * | 2012-05-31 | 2013-12-12 | Semes Co Ltd | 基板洗浄装置及び基板洗浄方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5218594U (enrdf_load_stackoverflow) * | 1975-07-28 | 1977-02-09 | ||
| JPS5546936A (en) * | 1978-09-06 | 1980-04-02 | Ekstroem H A B & Co | Mandrel that can be expanded |
| JPS588378U (ja) * | 1981-07-07 | 1983-01-19 | 内田 千年 | ２個の小物用収納袋にも転用できる着脱自在の防寒用襟及保温器用入部を兼備せる掛蒲団カバ− |
-
1983
- 1983-07-02 JP JP12076083A patent/JPS6012187A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5218594U (enrdf_load_stackoverflow) * | 1975-07-28 | 1977-02-09 | ||
| JPS5546936A (en) * | 1978-09-06 | 1980-04-02 | Ekstroem H A B & Co | Mandrel that can be expanded |
| JPS588378U (ja) * | 1981-07-07 | 1983-01-19 | 内田 千年 | ２個の小物用収納袋にも転用できる着脱自在の防寒用襟及保温器用入部を兼備せる掛蒲団カバ− |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03263831A (ja) * | 1990-03-14 | 1991-11-25 | Dan Clean Prod:Kk | スプレー洗浄装置 |
| JPH0551229A (ja) * | 1991-08-23 | 1993-03-02 | Bandou Kiko Kk | ガラス板の加工機械 |
| US5807166A (en) * | 1994-07-21 | 1998-09-15 | Bando Kiko Co., Ltd. | Glass-plate working machine |
| JP2011228385A (ja) * | 2010-04-16 | 2011-11-10 | Denso Corp | 洗浄乾燥方法および洗浄乾燥装置 |
| JP2013251548A (ja) * | 2012-05-31 | 2013-12-12 | Semes Co Ltd | 基板洗浄装置及び基板洗浄方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0237232B2 (enrdf_load_stackoverflow) | 1990-08-23 |
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