JPH0237232B2 - - Google Patents
Info
- Publication number
- JPH0237232B2 JPH0237232B2 JP58120760A JP12076083A JPH0237232B2 JP H0237232 B2 JPH0237232 B2 JP H0237232B2 JP 58120760 A JP58120760 A JP 58120760A JP 12076083 A JP12076083 A JP 12076083A JP H0237232 B2 JPH0237232 B2 JP H0237232B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- solvent
- cleaning solvent
- cleaned
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12076083A JPS6012187A (ja) | 1983-07-02 | 1983-07-02 | 洗浄方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12076083A JPS6012187A (ja) | 1983-07-02 | 1983-07-02 | 洗浄方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6012187A JPS6012187A (ja) | 1985-01-22 |
| JPH0237232B2 true JPH0237232B2 (enrdf_load_stackoverflow) | 1990-08-23 |
Family
ID=14794311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12076083A Granted JPS6012187A (ja) | 1983-07-02 | 1983-07-02 | 洗浄方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6012187A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0744167B2 (ja) * | 1990-03-14 | 1995-05-15 | 株式会社ダン・クリーン・プロダクト | スプレー洗浄装置 |
| JP2596483B2 (ja) * | 1991-08-23 | 1997-04-02 | 坂東機工株式会社 | ガラス板の加工機械 |
| US5807166A (en) * | 1994-07-21 | 1998-09-15 | Bando Kiko Co., Ltd. | Glass-plate working machine |
| JP5423555B2 (ja) * | 2010-04-16 | 2014-02-19 | 株式会社デンソー | 洗浄乾燥方法および洗浄乾燥装置 |
| US9406501B2 (en) * | 2012-05-31 | 2016-08-02 | Semes Co., Ltd. | Apparatus and method for cleaning substrate |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5218594U (enrdf_load_stackoverflow) * | 1975-07-28 | 1977-02-09 | ||
| SE413477B (sv) * | 1978-09-06 | 1980-06-02 | Ekstrom & Co H A B | Expanderbar dorn for anvendning vid uppbyggnad av ror |
| JPS5826616Y2 (ja) * | 1981-07-07 | 1983-06-08 | 千年 内田 | ２個の小物用収納袋にも転用できる着脱自在の防寒用襟及保温器用入部を兼備せる掛蒲団カバ− |
-
1983
- 1983-07-02 JP JP12076083A patent/JPS6012187A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6012187A (ja) | 1985-01-22 |
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