JPS60105235A - アルミニウムおよびアルミニウム合金の反応性イオンエッチング法 - Google Patents

アルミニウムおよびアルミニウム合金の反応性イオンエッチング法

Info

Publication number
JPS60105235A
JPS60105235A JP59038928A JP3892884A JPS60105235A JP S60105235 A JPS60105235 A JP S60105235A JP 59038928 A JP59038928 A JP 59038928A JP 3892884 A JP3892884 A JP 3892884A JP S60105235 A JPS60105235 A JP S60105235A
Authority
JP
Japan
Prior art keywords
volume
thin film
aluminum
reactive ion
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59038928A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0336300B2 (enExample
Inventor
リチャード・ジョセフ・サイア
バーナード・ゴロウィッツ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of JPS60105235A publication Critical patent/JPS60105235A/ja
Publication of JPH0336300B2 publication Critical patent/JPH0336300B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P70/273—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
    • H01L21/02071—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a delineation, e.g. RIE, of conductive layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP59038928A 1983-03-03 1984-03-02 アルミニウムおよびアルミニウム合金の反応性イオンエッチング法 Granted JPS60105235A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US471617 1983-03-03
US06/471,617 US4444618A (en) 1983-03-03 1983-03-03 Processes and gas mixtures for the reactive ion etching of aluminum and aluminum alloys

Publications (2)

Publication Number Publication Date
JPS60105235A true JPS60105235A (ja) 1985-06-10
JPH0336300B2 JPH0336300B2 (enExample) 1991-05-31

Family

ID=23872338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59038928A Granted JPS60105235A (ja) 1983-03-03 1984-03-02 アルミニウムおよびアルミニウム合金の反応性イオンエッチング法

Country Status (2)

Country Link
US (1) US4444618A (enExample)
JP (1) JPS60105235A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6396920A (ja) * 1986-10-13 1988-04-27 Sony Corp アルミニウム合金のドライエツチング方法
JP2002246369A (ja) * 2001-02-15 2002-08-30 Sharp Corp 薄膜ドライエッチング方法
JP2007035860A (ja) * 2005-07-26 2007-02-08 Hitachi High-Technologies Corp 半導体装置の製造方法
JP2009111190A (ja) * 2007-10-30 2009-05-21 Sharp Corp プラズマエッチング方法、プラズマエッチング装置、および固体撮像素子の製造方法

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4496425A (en) * 1984-01-30 1985-01-29 At&T Technologies, Inc. Technique for determining the end point of an etching process
US4547261A (en) * 1984-09-28 1985-10-15 Rca Corporation Anisotropic etching of aluminum
US4767724A (en) * 1986-03-27 1988-08-30 General Electric Company Unframed via interconnection with dielectric etch stop
US4999320A (en) * 1988-03-31 1991-03-12 Texas Instruments Incorporated Method for suppressing ionization avalanches in a helium wafer cooling assembly
JPH03156927A (ja) * 1989-10-24 1991-07-04 Hewlett Packard Co <Hp> アルミ・メタライゼーションのパターン形成方法
US5126289A (en) * 1990-07-20 1992-06-30 At&T Bell Laboratories Semiconductor lithography methods using an arc of organic material
US5211804A (en) * 1990-10-16 1993-05-18 Oki Electric Industry, Co., Ltd. Method for dry etching
US5362356A (en) * 1990-12-20 1994-11-08 Lsi Logic Corporation Plasma etching process control
EP0660393B1 (en) * 1993-12-23 2000-05-10 STMicroelectronics, Inc. Method and dielectric structure for facilitating overetching of metal without damage to inter-level dielectric
US5591301A (en) * 1994-12-22 1997-01-07 Siemens Aktiengesellschaft Plasma etching method
US5930639A (en) * 1996-04-08 1999-07-27 Micron Technology, Inc. Method for precision etching of platinum electrodes
US5688719A (en) * 1996-06-07 1997-11-18 Taiwan Semiconductor Manufacturing Company Ltd Method for plasma hardening of patterned photoresist layers
JP3024747B2 (ja) * 1997-03-05 2000-03-21 日本電気株式会社 半導体メモリの製造方法
US5780363A (en) * 1997-04-04 1998-07-14 International Business Machines Coporation Etching composition and use thereof
US6008129A (en) * 1997-08-28 1999-12-28 Motorola, Inc. Process for forming a semiconductor device
US5965465A (en) * 1997-09-18 1999-10-12 International Business Machines Corporation Etching of silicon nitride
US6150282A (en) * 1997-11-13 2000-11-21 International Business Machines Corporation Selective removal of etching residues
US6033996A (en) * 1997-11-13 2000-03-07 International Business Machines Corporation Process for removing etching residues, etching mask and silicon nitride and/or silicon dioxide
US6143476A (en) * 1997-12-12 2000-11-07 Applied Materials Inc Method for high temperature etching of patterned layers using an organic mask stack
TW505984B (en) 1997-12-12 2002-10-11 Applied Materials Inc Method of etching patterned layers useful as masking during subsequent etching or for damascene structures
US6117796A (en) * 1998-08-13 2000-09-12 International Business Machines Corporation Removal of silicon oxide
US6200891B1 (en) 1998-08-13 2001-03-13 International Business Machines Corporation Removal of dielectric oxides
US6319822B1 (en) * 1998-10-01 2001-11-20 Taiwan Semiconductor Manufacturing Company Process for forming an integrated contact or via
US7230292B2 (en) * 2003-08-05 2007-06-12 Micron Technology, Inc. Stud electrode and process for making same
US8500965B2 (en) * 2004-05-06 2013-08-06 Ppg Industries Ohio, Inc. MSVD coating process
JP5875752B2 (ja) * 2010-07-26 2016-03-02 住友電工デバイス・イノベーション株式会社 半導体装置の製造方法
CN117607232A (zh) * 2023-11-22 2024-02-27 浙江师范大学 一种使用两个强度电场的微纳米生物和代谢物传感器和执行器的横向和垂直电泳方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58213877A (ja) * 1982-06-05 1983-12-12 Anelva Corp アルミニウムのドライエツチング方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54158343A (en) * 1978-06-05 1979-12-14 Hitachi Ltd Dry etching method for al and al alloy
EP0023429B1 (en) * 1979-07-31 1985-12-18 Fujitsu Limited Dry etching of metal film
JPS5690525A (en) * 1979-11-28 1981-07-22 Fujitsu Ltd Manufacture of semiconductor device
US4380488A (en) * 1980-10-14 1983-04-19 Branson International Plasma Corporation Process and gas mixture for etching aluminum

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58213877A (ja) * 1982-06-05 1983-12-12 Anelva Corp アルミニウムのドライエツチング方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6396920A (ja) * 1986-10-13 1988-04-27 Sony Corp アルミニウム合金のドライエツチング方法
JP2002246369A (ja) * 2001-02-15 2002-08-30 Sharp Corp 薄膜ドライエッチング方法
JP2007035860A (ja) * 2005-07-26 2007-02-08 Hitachi High-Technologies Corp 半導体装置の製造方法
JP2009111190A (ja) * 2007-10-30 2009-05-21 Sharp Corp プラズマエッチング方法、プラズマエッチング装置、および固体撮像素子の製造方法

Also Published As

Publication number Publication date
JPH0336300B2 (enExample) 1991-05-31
US4444618A (en) 1984-04-24

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