JPS5984464A - 半導体集積回路装置の製造方法 - Google Patents

半導体集積回路装置の製造方法

Info

Publication number
JPS5984464A
JPS5984464A JP57195442A JP19544282A JPS5984464A JP S5984464 A JPS5984464 A JP S5984464A JP 57195442 A JP57195442 A JP 57195442A JP 19544282 A JP19544282 A JP 19544282A JP S5984464 A JPS5984464 A JP S5984464A
Authority
JP
Japan
Prior art keywords
film
base
collector
forming
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57195442A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6248388B2 (enrdf_load_stackoverflow
Inventor
Tadashi Hirao
正 平尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57195442A priority Critical patent/JPS5984464A/ja
Publication of JPS5984464A publication Critical patent/JPS5984464A/ja
Publication of JPS6248388B2 publication Critical patent/JPS6248388B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0112—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
    • H10D84/0116—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including integrated injection logic [I2L]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Landscapes

  • Bipolar Integrated Circuits (AREA)
JP57195442A 1982-11-06 1982-11-06 半導体集積回路装置の製造方法 Granted JPS5984464A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57195442A JPS5984464A (ja) 1982-11-06 1982-11-06 半導体集積回路装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57195442A JPS5984464A (ja) 1982-11-06 1982-11-06 半導体集積回路装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5984464A true JPS5984464A (ja) 1984-05-16
JPS6248388B2 JPS6248388B2 (enrdf_load_stackoverflow) 1987-10-13

Family

ID=16341128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57195442A Granted JPS5984464A (ja) 1982-11-06 1982-11-06 半導体集積回路装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5984464A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4774634A (en) * 1986-01-21 1988-09-27 Key Tronic Corporation Printed circuit board assembly

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0430590U (enrdf_load_stackoverflow) * 1990-07-03 1992-03-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4774634A (en) * 1986-01-21 1988-09-27 Key Tronic Corporation Printed circuit board assembly

Also Published As

Publication number Publication date
JPS6248388B2 (enrdf_load_stackoverflow) 1987-10-13

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