JPS5956760A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS5956760A
JPS5956760A JP58153280A JP15328083A JPS5956760A JP S5956760 A JPS5956760 A JP S5956760A JP 58153280 A JP58153280 A JP 58153280A JP 15328083 A JP15328083 A JP 15328083A JP S5956760 A JPS5956760 A JP S5956760A
Authority
JP
Japan
Prior art keywords
layer
polycrystalline
silicon
wiring
wiring layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58153280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6349388B2 (enExample
Inventor
Makoto Takechi
武智　真
Hiroshi Kawamoto
洋 川本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58153280A priority Critical patent/JPS5956760A/ja
Publication of JPS5956760A publication Critical patent/JPS5956760A/ja
Publication of JPS6349388B2 publication Critical patent/JPS6349388B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP58153280A 1983-08-24 1983-08-24 半導体装置 Granted JPS5956760A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58153280A JPS5956760A (ja) 1983-08-24 1983-08-24 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58153280A JPS5956760A (ja) 1983-08-24 1983-08-24 半導体装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP10058276A Division JPS5326688A (en) 1976-08-25 1976-08-25 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5956760A true JPS5956760A (ja) 1984-04-02
JPS6349388B2 JPS6349388B2 (enExample) 1988-10-04

Family

ID=15559014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58153280A Granted JPS5956760A (ja) 1983-08-24 1983-08-24 半導体装置

Country Status (1)

Country Link
JP (1) JPS5956760A (enExample)

Also Published As

Publication number Publication date
JPS6349388B2 (enExample) 1988-10-04

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