JPH0543299B2 - - Google Patents

Info

Publication number
JPH0543299B2
JPH0543299B2 JP60285593A JP28559385A JPH0543299B2 JP H0543299 B2 JPH0543299 B2 JP H0543299B2 JP 60285593 A JP60285593 A JP 60285593A JP 28559385 A JP28559385 A JP 28559385A JP H0543299 B2 JPH0543299 B2 JP H0543299B2
Authority
JP
Japan
Prior art keywords
layer
substrate
film
sio
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60285593A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62145739A (ja
Inventor
Tetsuo Mizoguchi
Tomoyuki Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP28559385A priority Critical patent/JPS62145739A/ja
Publication of JPS62145739A publication Critical patent/JPS62145739A/ja
Publication of JPH0543299B2 publication Critical patent/JPH0543299B2/ja
Granted legal-status Critical Current

Links

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  • Element Separation (AREA)
JP28559385A 1985-12-20 1985-12-20 誘電体分離基板 Granted JPS62145739A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28559385A JPS62145739A (ja) 1985-12-20 1985-12-20 誘電体分離基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28559385A JPS62145739A (ja) 1985-12-20 1985-12-20 誘電体分離基板

Publications (2)

Publication Number Publication Date
JPS62145739A JPS62145739A (ja) 1987-06-29
JPH0543299B2 true JPH0543299B2 (enExample) 1993-07-01

Family

ID=17693556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28559385A Granted JPS62145739A (ja) 1985-12-20 1985-12-20 誘電体分離基板

Country Status (1)

Country Link
JP (1) JPS62145739A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143645A (ja) * 1983-12-29 1985-07-29 Hitachi Ltd 半導体装置

Also Published As

Publication number Publication date
JPS62145739A (ja) 1987-06-29

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