JPS593935A - 半導体ウエハ−を光照射で加熱する方法 - Google Patents

半導体ウエハ−を光照射で加熱する方法

Info

Publication number
JPS593935A
JPS593935A JP57111500A JP11150082A JPS593935A JP S593935 A JPS593935 A JP S593935A JP 57111500 A JP57111500 A JP 57111500A JP 11150082 A JP11150082 A JP 11150082A JP S593935 A JPS593935 A JP S593935A
Authority
JP
Japan
Prior art keywords
wafer
temperature
semiconductor wafer
auxiliary heating
heating source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57111500A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6331096B2 (OSRAM
Inventor
Yoshiki Mimura
芳樹 三村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP57111500A priority Critical patent/JPS593935A/ja
Priority to US06/445,492 priority patent/US4468259A/en
Publication of JPS593935A publication Critical patent/JPS593935A/ja
Publication of JPS6331096B2 publication Critical patent/JPS6331096B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P34/422—

Landscapes

  • Recrystallisation Techniques (AREA)
JP57111500A 1981-12-04 1982-06-30 半導体ウエハ−を光照射で加熱する方法 Granted JPS593935A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57111500A JPS593935A (ja) 1982-06-30 1982-06-30 半導体ウエハ−を光照射で加熱する方法
US06/445,492 US4468259A (en) 1981-12-04 1982-11-30 Uniform wafer heating by controlling light source and circumferential heating of wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57111500A JPS593935A (ja) 1982-06-30 1982-06-30 半導体ウエハ−を光照射で加熱する方法

Publications (2)

Publication Number Publication Date
JPS593935A true JPS593935A (ja) 1984-01-10
JPS6331096B2 JPS6331096B2 (OSRAM) 1988-06-22

Family

ID=14562866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57111500A Granted JPS593935A (ja) 1981-12-04 1982-06-30 半導体ウエハ−を光照射で加熱する方法

Country Status (1)

Country Link
JP (1) JPS593935A (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60167335U (ja) * 1984-04-14 1985-11-06 大日本スクリ−ン製造株式会社 熱処理装置
JPH02291118A (ja) * 1988-12-30 1990-11-30 Ag Processing Technol Inc ウェハーの表面及び周囲加熱のための放射熱源を利用したウェハー均一加熱方法及びその装置
US5310339A (en) * 1990-09-26 1994-05-10 Tokyo Electron Limited Heat treatment apparatus having a wafer boat
US11610803B2 (en) 2020-10-20 2023-03-21 Changxin Memory Technologies, Inc. Mounting fixture of bearing ring for wafer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175826A (ja) * 1981-12-04 1983-10-15 Ushio Inc 半導体を光照射で加熱する方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175826A (ja) * 1981-12-04 1983-10-15 Ushio Inc 半導体を光照射で加熱する方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60167335U (ja) * 1984-04-14 1985-11-06 大日本スクリ−ン製造株式会社 熱処理装置
JPH02291118A (ja) * 1988-12-30 1990-11-30 Ag Processing Technol Inc ウェハーの表面及び周囲加熱のための放射熱源を利用したウェハー均一加熱方法及びその装置
US5310339A (en) * 1990-09-26 1994-05-10 Tokyo Electron Limited Heat treatment apparatus having a wafer boat
US11610803B2 (en) 2020-10-20 2023-03-21 Changxin Memory Technologies, Inc. Mounting fixture of bearing ring for wafer

Also Published As

Publication number Publication date
JPS6331096B2 (OSRAM) 1988-06-22

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