JPH0240480Y2 - - Google Patents

Info

Publication number
JPH0240480Y2
JPH0240480Y2 JP1982194017U JP19401782U JPH0240480Y2 JP H0240480 Y2 JPH0240480 Y2 JP H0240480Y2 JP 1982194017 U JP1982194017 U JP 1982194017U JP 19401782 U JP19401782 U JP 19401782U JP H0240480 Y2 JPH0240480 Y2 JP H0240480Y2
Authority
JP
Japan
Prior art keywords
wafer
heater
light irradiation
heat
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982194017U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5998300U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19401782U priority Critical patent/JPS5998300U/ja
Publication of JPS5998300U publication Critical patent/JPS5998300U/ja
Application granted granted Critical
Publication of JPH0240480Y2 publication Critical patent/JPH0240480Y2/ja
Granted legal-status Critical Current

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  • Furnace Details (AREA)
JP19401782U 1982-12-23 1982-12-23 光照射炉 Granted JPS5998300U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19401782U JPS5998300U (ja) 1982-12-23 1982-12-23 光照射炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19401782U JPS5998300U (ja) 1982-12-23 1982-12-23 光照射炉

Publications (2)

Publication Number Publication Date
JPS5998300U JPS5998300U (ja) 1984-07-03
JPH0240480Y2 true JPH0240480Y2 (OSRAM) 1990-10-29

Family

ID=30417147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19401782U Granted JPS5998300U (ja) 1982-12-23 1982-12-23 光照射炉

Country Status (1)

Country Link
JP (1) JPS5998300U (OSRAM)

Also Published As

Publication number Publication date
JPS5998300U (ja) 1984-07-03

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