JPS6244847B2 - - Google Patents

Info

Publication number
JPS6244847B2
JPS6244847B2 JP56194575A JP19457581A JPS6244847B2 JP S6244847 B2 JPS6244847 B2 JP S6244847B2 JP 56194575 A JP56194575 A JP 56194575A JP 19457581 A JP19457581 A JP 19457581A JP S6244847 B2 JPS6244847 B2 JP S6244847B2
Authority
JP
Japan
Prior art keywords
wafer
outer periphery
light irradiation
semiconductor wafer
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56194575A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58194332A (ja
Inventor
Yoshiki Mimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP56194575A priority Critical patent/JPS58194332A/ja
Priority to US06/445,493 priority patent/US4469529A/en
Publication of JPS58194332A publication Critical patent/JPS58194332A/ja
Publication of JPS6244847B2 publication Critical patent/JPS6244847B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P34/422—

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Resistance Heating (AREA)
JP56194575A 1981-12-04 1981-12-04 半導体を光照射で加熱する方法 Granted JPS58194332A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP56194575A JPS58194332A (ja) 1981-12-04 1981-12-04 半導体を光照射で加熱する方法
US06/445,493 US4469529A (en) 1981-12-04 1982-11-30 Method for heating semiconductor wafer by means of application of radiated light with supplemental circumferential heating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56194575A JPS58194332A (ja) 1981-12-04 1981-12-04 半導体を光照射で加熱する方法

Publications (2)

Publication Number Publication Date
JPS58194332A JPS58194332A (ja) 1983-11-12
JPS6244847B2 true JPS6244847B2 (OSRAM) 1987-09-22

Family

ID=16326811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56194575A Granted JPS58194332A (ja) 1981-12-04 1981-12-04 半導体を光照射で加熱する方法

Country Status (1)

Country Link
JP (1) JPS58194332A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593934A (ja) * 1982-06-30 1984-01-10 Ushio Inc 半導体ウエハ−を光照射で加熱する方法
JPS593933A (ja) * 1982-06-30 1984-01-10 Ushio Inc 半導体ウエハ−を光照射で加熱する方法
JPS5998518A (ja) * 1982-11-26 1984-06-06 Seiko Epson Corp ランプ・アニ−ル装置

Also Published As

Publication number Publication date
JPS58194332A (ja) 1983-11-12

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