JPH0234824Y2 - - Google Patents

Info

Publication number
JPH0234824Y2
JPH0234824Y2 JP1982144613U JP14461382U JPH0234824Y2 JP H0234824 Y2 JPH0234824 Y2 JP H0234824Y2 JP 1982144613 U JP1982144613 U JP 1982144613U JP 14461382 U JP14461382 U JP 14461382U JP H0234824 Y2 JPH0234824 Y2 JP H0234824Y2
Authority
JP
Japan
Prior art keywords
heat treatment
wafer
furnace
treatment apparatus
periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982144613U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5948040U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14461382U priority Critical patent/JPS5948040U/ja
Publication of JPS5948040U publication Critical patent/JPS5948040U/ja
Application granted granted Critical
Publication of JPH0234824Y2 publication Critical patent/JPH0234824Y2/ja
Granted legal-status Critical Current

Links

JP14461382U 1982-09-24 1982-09-24 熱処理装置 Granted JPS5948040U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14461382U JPS5948040U (ja) 1982-09-24 1982-09-24 熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14461382U JPS5948040U (ja) 1982-09-24 1982-09-24 熱処理装置

Publications (2)

Publication Number Publication Date
JPS5948040U JPS5948040U (ja) 1984-03-30
JPH0234824Y2 true JPH0234824Y2 (OSRAM) 1990-09-19

Family

ID=30322437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14461382U Granted JPS5948040U (ja) 1982-09-24 1982-09-24 熱処理装置

Country Status (1)

Country Link
JP (1) JPS5948040U (OSRAM)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565851U (OSRAM) * 1978-10-26 1980-05-07

Also Published As

Publication number Publication date
JPS5948040U (ja) 1984-03-30

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