JPS5935489A - 光半導体装置の製造方法 - Google Patents

光半導体装置の製造方法

Info

Publication number
JPS5935489A
JPS5935489A JP57147357A JP14735782A JPS5935489A JP S5935489 A JPS5935489 A JP S5935489A JP 57147357 A JP57147357 A JP 57147357A JP 14735782 A JP14735782 A JP 14735782A JP S5935489 A JPS5935489 A JP S5935489A
Authority
JP
Japan
Prior art keywords
film
laser beam
conductive film
laser
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57147357A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447466B2 (enrdf_load_stackoverflow
Inventor
Toshiaki Yokoo
横尾　敏昭
Takashi Shibuya
澁谷　尚
Masaru Takeuchi
勝 武内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Sanyo Denki Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Sanyo Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd, Sanyo Denki Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP57147357A priority Critical patent/JPS5935489A/ja
Publication of JPS5935489A publication Critical patent/JPS5935489A/ja
Publication of JPH0447466B2 publication Critical patent/JPH0447466B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP57147357A 1982-08-24 1982-08-24 光半導体装置の製造方法 Granted JPS5935489A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57147357A JPS5935489A (ja) 1982-08-24 1982-08-24 光半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57147357A JPS5935489A (ja) 1982-08-24 1982-08-24 光半導体装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP3300520A Division JP2648064B2 (ja) 1991-11-15 1991-11-15 光半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5935489A true JPS5935489A (ja) 1984-02-27
JPH0447466B2 JPH0447466B2 (enrdf_load_stackoverflow) 1992-08-04

Family

ID=15428363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57147357A Granted JPS5935489A (ja) 1982-08-24 1982-08-24 光半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5935489A (enrdf_load_stackoverflow)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182757A (ja) * 1984-02-29 1985-09-18 Kanegafuchi Chem Ind Co Ltd 集積型太陽電池
JPS616828A (ja) * 1984-06-20 1986-01-13 Sanyo Electric Co Ltd 集積型光起電力装置の製造方法
JPS6114727A (ja) * 1984-06-29 1986-01-22 Sanyo Electric Co Ltd 半導体装置の製造方法
JPS6142971A (ja) * 1984-08-06 1986-03-01 Sanyo Electric Co Ltd 半導体装置の製造方法
JPS6174376A (ja) * 1984-09-19 1986-04-16 Fuji Electric Co Ltd 薄膜光起電力素子の製造方法
JPS61105884A (ja) * 1984-10-29 1986-05-23 Semiconductor Energy Lab Co Ltd 光加工方法
JPS61210681A (ja) * 1986-02-20 1986-09-18 Sanyo Electric Co Ltd 集積型光起電力装置の製造方法
JPS6265479A (ja) * 1985-09-18 1987-03-24 Fuji Electric Corp Res & Dev Ltd 薄膜太陽電池の製造方法
US4668840A (en) * 1984-06-29 1987-05-26 Sanyo Electric Co., Ltd. Photovoltaic device
US4697041A (en) * 1985-02-15 1987-09-29 Teijin Limited Integrated solar cells
JPH03154385A (ja) * 1989-11-13 1991-07-02 Mitsubishi Heavy Ind Ltd 光起電力発生装置の製造方法
JPH04363071A (ja) * 1991-11-15 1992-12-15 Sanyo Electric Co Ltd 光半導体装置の製造方法
JP2011517136A (ja) * 2008-04-15 2011-05-26 リニューアブル・エナジー・コーポレーション・エーエスエー ウェーハベースのソーラパネルの作製方法
US20120152339A1 (en) * 2010-03-18 2012-06-21 Fuji Electric Co., Ltd. Thin film solar cell and method for manufacturing same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52108780A (en) * 1976-03-08 1977-09-12 Seiko Epson Corp Manufacture for solar cell

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52108780A (en) * 1976-03-08 1977-09-12 Seiko Epson Corp Manufacture for solar cell

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182757A (ja) * 1984-02-29 1985-09-18 Kanegafuchi Chem Ind Co Ltd 集積型太陽電池
JPS616828A (ja) * 1984-06-20 1986-01-13 Sanyo Electric Co Ltd 集積型光起電力装置の製造方法
US4668840A (en) * 1984-06-29 1987-05-26 Sanyo Electric Co., Ltd. Photovoltaic device
JPS6114727A (ja) * 1984-06-29 1986-01-22 Sanyo Electric Co Ltd 半導体装置の製造方法
JPS6142971A (ja) * 1984-08-06 1986-03-01 Sanyo Electric Co Ltd 半導体装置の製造方法
JPS6174376A (ja) * 1984-09-19 1986-04-16 Fuji Electric Co Ltd 薄膜光起電力素子の製造方法
JPS61105884A (ja) * 1984-10-29 1986-05-23 Semiconductor Energy Lab Co Ltd 光加工方法
US4697041A (en) * 1985-02-15 1987-09-29 Teijin Limited Integrated solar cells
JPS6265479A (ja) * 1985-09-18 1987-03-24 Fuji Electric Corp Res & Dev Ltd 薄膜太陽電池の製造方法
JPS61210681A (ja) * 1986-02-20 1986-09-18 Sanyo Electric Co Ltd 集積型光起電力装置の製造方法
JPH03154385A (ja) * 1989-11-13 1991-07-02 Mitsubishi Heavy Ind Ltd 光起電力発生装置の製造方法
JPH04363071A (ja) * 1991-11-15 1992-12-15 Sanyo Electric Co Ltd 光半導体装置の製造方法
JP2011517136A (ja) * 2008-04-15 2011-05-26 リニューアブル・エナジー・コーポレーション・エーエスエー ウェーハベースのソーラパネルの作製方法
US10147830B2 (en) 2008-04-15 2018-12-04 Rec Solar Pte. Ltd. Method for production of wafer based solar panels
US20120152339A1 (en) * 2010-03-18 2012-06-21 Fuji Electric Co., Ltd. Thin film solar cell and method for manufacturing same

Also Published As

Publication number Publication date
JPH0447466B2 (enrdf_load_stackoverflow) 1992-08-04

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