JPS5927206A - 欠陥パタ−ン検出方法 - Google Patents
欠陥パタ−ン検出方法Info
- Publication number
- JPS5927206A JPS5927206A JP13755382A JP13755382A JPS5927206A JP S5927206 A JPS5927206 A JP S5927206A JP 13755382 A JP13755382 A JP 13755382A JP 13755382 A JP13755382 A JP 13755382A JP S5927206 A JPS5927206 A JP S5927206A
- Authority
- JP
- Japan
- Prior art keywords
- image
- value
- defect
- values
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Sorting Of Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13755382A JPS5927206A (ja) | 1982-08-06 | 1982-08-06 | 欠陥パタ−ン検出方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13755382A JPS5927206A (ja) | 1982-08-06 | 1982-08-06 | 欠陥パタ−ン検出方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5927206A true JPS5927206A (ja) | 1984-02-13 |
JPH0332723B2 JPH0332723B2 (fr) | 1991-05-14 |
Family
ID=15201398
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13755382A Granted JPS5927206A (ja) | 1982-08-06 | 1982-08-06 | 欠陥パタ−ン検出方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5927206A (fr) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62163953A (ja) * | 1985-12-27 | 1987-07-20 | エイ・ティ・アンド・ティ・コーポレーション | 製品を検査する方法と装置 |
JPH01176722A (ja) * | 1987-12-31 | 1989-07-13 | Jiro Sasaoka | 沈降物の移送装置 |
JP2010256053A (ja) * | 2009-04-22 | 2010-11-11 | Visco Technologies Corp | 形状欠損検査装置、形状モデリング装置および形状欠損検査プログラム |
JP2011180120A (ja) * | 2010-02-03 | 2011-09-15 | Daiwa House Industry Co Ltd | 防水シート診断方法および診断装置 |
-
1982
- 1982-08-06 JP JP13755382A patent/JPS5927206A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62163953A (ja) * | 1985-12-27 | 1987-07-20 | エイ・ティ・アンド・ティ・コーポレーション | 製品を検査する方法と装置 |
JPH01176722A (ja) * | 1987-12-31 | 1989-07-13 | Jiro Sasaoka | 沈降物の移送装置 |
JP2010256053A (ja) * | 2009-04-22 | 2010-11-11 | Visco Technologies Corp | 形状欠損検査装置、形状モデリング装置および形状欠損検査プログラム |
JP2011180120A (ja) * | 2010-02-03 | 2011-09-15 | Daiwa House Industry Co Ltd | 防水シート診断方法および診断装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0332723B2 (fr) | 1991-05-14 |
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