JPS5922117Y2 - 化学エツチング用試料保持装置 - Google Patents

化学エツチング用試料保持装置

Info

Publication number
JPS5922117Y2
JPS5922117Y2 JP5349878U JP5349878U JPS5922117Y2 JP S5922117 Y2 JPS5922117 Y2 JP S5922117Y2 JP 5349878 U JP5349878 U JP 5349878U JP 5349878 U JP5349878 U JP 5349878U JP S5922117 Y2 JPS5922117 Y2 JP S5922117Y2
Authority
JP
Japan
Prior art keywords
sample
sample holding
main body
etching
holding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5349878U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5546601U (enrdf_load_stackoverflow
Inventor
喜一 高本
国夫 小薮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP5349878U priority Critical patent/JPS5922117Y2/ja
Publication of JPS5546601U publication Critical patent/JPS5546601U/ja
Application granted granted Critical
Publication of JPS5922117Y2 publication Critical patent/JPS5922117Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP5349878U 1978-04-24 1978-04-24 化学エツチング用試料保持装置 Expired JPS5922117Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5349878U JPS5922117Y2 (ja) 1978-04-24 1978-04-24 化学エツチング用試料保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5349878U JPS5922117Y2 (ja) 1978-04-24 1978-04-24 化学エツチング用試料保持装置

Publications (2)

Publication Number Publication Date
JPS5546601U JPS5546601U (enrdf_load_stackoverflow) 1980-03-27
JPS5922117Y2 true JPS5922117Y2 (ja) 1984-07-02

Family

ID=28946550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5349878U Expired JPS5922117Y2 (ja) 1978-04-24 1978-04-24 化学エツチング用試料保持装置

Country Status (1)

Country Link
JP (1) JPS5922117Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928903U (ja) * 1982-08-17 1984-02-23 本田技研工業株式会社 自動二輪車のヘッドライト装置
JP2006237492A (ja) * 2005-02-28 2006-09-07 Dainippon Screen Mfg Co Ltd ウエハ処理装置

Also Published As

Publication number Publication date
JPS5546601U (enrdf_load_stackoverflow) 1980-03-27

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