JPS59217615A - アモルフアスシリコン成膜装置 - Google Patents
アモルフアスシリコン成膜装置Info
- Publication number
- JPS59217615A JPS59217615A JP9029683A JP9029683A JPS59217615A JP S59217615 A JPS59217615 A JP S59217615A JP 9029683 A JP9029683 A JP 9029683A JP 9029683 A JP9029683 A JP 9029683A JP S59217615 A JPS59217615 A JP S59217615A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- amorphous silicon
- reaction vessel
- film
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021417 amorphous silicon Inorganic materials 0.000 title claims abstract description 26
- 238000006243 chemical reaction Methods 0.000 claims abstract description 35
- 108091008695 photoreceptors Proteins 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 13
- 239000002994 raw material Substances 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract 3
- 239000007789 gas Substances 0.000 description 54
- 239000010408 film Substances 0.000 description 22
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 241000519995 Stachys sylvatica Species 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910007264 Si2H6 Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Photoreceptors In Electrophotography (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9029683A JPS59217615A (ja) | 1983-05-23 | 1983-05-23 | アモルフアスシリコン成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9029683A JPS59217615A (ja) | 1983-05-23 | 1983-05-23 | アモルフアスシリコン成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59217615A true JPS59217615A (ja) | 1984-12-07 |
| JPH0520502B2 JPH0520502B2 (enrdf_load_stackoverflow) | 1993-03-19 |
Family
ID=13994569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9029683A Granted JPS59217615A (ja) | 1983-05-23 | 1983-05-23 | アモルフアスシリコン成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59217615A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62218570A (ja) * | 1986-03-20 | 1987-09-25 | Canon Inc | 堆積膜製造装置 |
| US11377731B2 (en) | 2017-12-22 | 2022-07-05 | Murata Manufacturing Co., Ltd. | Film-forming device |
| US11891692B2 (en) | 2017-12-22 | 2024-02-06 | Murata Manufacturing Co., Ltd. | Film-forming device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57192258A (en) * | 1981-05-19 | 1982-11-26 | Oki Electric Ind Co Ltd | Film forming apparatus using glow discharge |
| JPS5953672A (ja) * | 1982-09-21 | 1984-03-28 | Canon Inc | プラズマｃｖｄ装置 |
-
1983
- 1983-05-23 JP JP9029683A patent/JPS59217615A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57192258A (en) * | 1981-05-19 | 1982-11-26 | Oki Electric Ind Co Ltd | Film forming apparatus using glow discharge |
| JPS5953672A (ja) * | 1982-09-21 | 1984-03-28 | Canon Inc | プラズマｃｖｄ装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62218570A (ja) * | 1986-03-20 | 1987-09-25 | Canon Inc | 堆積膜製造装置 |
| US11377731B2 (en) | 2017-12-22 | 2022-07-05 | Murata Manufacturing Co., Ltd. | Film-forming device |
| US11891692B2 (en) | 2017-12-22 | 2024-02-06 | Murata Manufacturing Co., Ltd. | Film-forming device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0520502B2 (enrdf_load_stackoverflow) | 1993-03-19 |
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