JPS59217615A - アモルフアスシリコン成膜装置 - Google Patents

アモルフアスシリコン成膜装置

Info

Publication number
JPS59217615A
JPS59217615A JP9029683A JP9029683A JPS59217615A JP S59217615 A JPS59217615 A JP S59217615A JP 9029683 A JP9029683 A JP 9029683A JP 9029683 A JP9029683 A JP 9029683A JP S59217615 A JPS59217615 A JP S59217615A
Authority
JP
Japan
Prior art keywords
gas
amorphous silicon
reaction vessel
film
silicon film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9029683A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0520502B2 (enrdf_load_stackoverflow
Inventor
Hideji Yoshizawa
吉澤　秀二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP9029683A priority Critical patent/JPS59217615A/ja
Publication of JPS59217615A publication Critical patent/JPS59217615A/ja
Publication of JPH0520502B2 publication Critical patent/JPH0520502B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP9029683A 1983-05-23 1983-05-23 アモルフアスシリコン成膜装置 Granted JPS59217615A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9029683A JPS59217615A (ja) 1983-05-23 1983-05-23 アモルフアスシリコン成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9029683A JPS59217615A (ja) 1983-05-23 1983-05-23 アモルフアスシリコン成膜装置

Publications (2)

Publication Number Publication Date
JPS59217615A true JPS59217615A (ja) 1984-12-07
JPH0520502B2 JPH0520502B2 (enrdf_load_stackoverflow) 1993-03-19

Family

ID=13994569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9029683A Granted JPS59217615A (ja) 1983-05-23 1983-05-23 アモルフアスシリコン成膜装置

Country Status (1)

Country Link
JP (1) JPS59217615A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62218570A (ja) * 1986-03-20 1987-09-25 Canon Inc 堆積膜製造装置
US11377731B2 (en) 2017-12-22 2022-07-05 Murata Manufacturing Co., Ltd. Film-forming device
US11891692B2 (en) 2017-12-22 2024-02-06 Murata Manufacturing Co., Ltd. Film-forming device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192258A (en) * 1981-05-19 1982-11-26 Oki Electric Ind Co Ltd Film forming apparatus using glow discharge
JPS5953672A (ja) * 1982-09-21 1984-03-28 Canon Inc プラズマｃｖｄ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192258A (en) * 1981-05-19 1982-11-26 Oki Electric Ind Co Ltd Film forming apparatus using glow discharge
JPS5953672A (ja) * 1982-09-21 1984-03-28 Canon Inc プラズマｃｖｄ装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62218570A (ja) * 1986-03-20 1987-09-25 Canon Inc 堆積膜製造装置
US11377731B2 (en) 2017-12-22 2022-07-05 Murata Manufacturing Co., Ltd. Film-forming device
US11891692B2 (en) 2017-12-22 2024-02-06 Murata Manufacturing Co., Ltd. Film-forming device

Also Published As

Publication number Publication date
JPH0520502B2 (enrdf_load_stackoverflow) 1993-03-19

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