JPS6126365Y2 - - Google Patents
Info
- Publication number
- JPS6126365Y2 JPS6126365Y2 JP14154781U JP14154781U JPS6126365Y2 JP S6126365 Y2 JPS6126365 Y2 JP S6126365Y2 JP 14154781 U JP14154781 U JP 14154781U JP 14154781 U JP14154781 U JP 14154781U JP S6126365 Y2 JPS6126365 Y2 JP S6126365Y2
- Authority
- JP
- Japan
- Prior art keywords
- counter electrode
- photoreceptor
- electrode
- cylindrical
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 108091008695 photoreceptors Proteins 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 10
- 239000000843 powder Substances 0.000 description 9
- 229910021417 amorphous silicon Inorganic materials 0.000 description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910001370 Se alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14154781U JPS5845359U (ja) | 1981-09-24 | 1981-09-24 | 電子写真用感光体の製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14154781U JPS5845359U (ja) | 1981-09-24 | 1981-09-24 | 電子写真用感光体の製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5845359U JPS5845359U (ja) | 1983-03-26 |
| JPS6126365Y2 true JPS6126365Y2 (enrdf_load_stackoverflow) | 1986-08-07 |
Family
ID=29934643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14154781U Granted JPS5845359U (ja) | 1981-09-24 | 1981-09-24 | 電子写真用感光体の製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5845359U (enrdf_load_stackoverflow) |
-
1981
- 1981-09-24 JP JP14154781U patent/JPS5845359U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5845359U (ja) | 1983-03-26 |
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