JPH0135075B2 - - Google Patents

Info

Publication number
JPH0135075B2
JPH0135075B2 JP15094681A JP15094681A JPH0135075B2 JP H0135075 B2 JPH0135075 B2 JP H0135075B2 JP 15094681 A JP15094681 A JP 15094681A JP 15094681 A JP15094681 A JP 15094681A JP H0135075 B2 JPH0135075 B2 JP H0135075B2
Authority
JP
Japan
Prior art keywords
gas
electrode
cylindrical
drum
photosensitive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15094681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5852471A (ja
Inventor
Michiro Shimatani
Toyoki Kazama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Co Ltd
Priority to JP15094681A priority Critical patent/JPS5852471A/ja
Priority to US06/387,221 priority patent/US4438188A/en
Priority to DE3222491A priority patent/DE3222491A1/de
Publication of JPS5852471A publication Critical patent/JPS5852471A/ja
Publication of JPH0135075B2 publication Critical patent/JPH0135075B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • C23C16/5093—Coaxial electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP15094681A 1981-06-15 1981-09-24 電子写真用感光体の製造装置 Granted JPS5852471A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP15094681A JPS5852471A (ja) 1981-09-24 1981-09-24 電子写真用感光体の製造装置
US06/387,221 US4438188A (en) 1981-06-15 1982-06-10 Method for producing photosensitive film for electrophotography
DE3222491A DE3222491A1 (de) 1981-06-15 1982-06-15 Verfahren und vorrichtung zur herstellung eines lichtempfindlichen films auf einem substrat fuer elektrofotographie

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15094681A JPS5852471A (ja) 1981-09-24 1981-09-24 電子写真用感光体の製造装置

Publications (2)

Publication Number Publication Date
JPS5852471A JPS5852471A (ja) 1983-03-28
JPH0135075B2 true JPH0135075B2 (enrdf_load_stackoverflow) 1989-07-24

Family

ID=15507867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15094681A Granted JPS5852471A (ja) 1981-06-15 1981-09-24 電子写真用感光体の製造装置

Country Status (1)

Country Link
JP (1) JPS5852471A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5852471A (ja) 1983-03-28

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