JPS59209677A - コ−テイング装置 - Google Patents

コ−テイング装置

Info

Publication number
JPS59209677A
JPS59209677A JP58084429A JP8442983A JPS59209677A JP S59209677 A JPS59209677 A JP S59209677A JP 58084429 A JP58084429 A JP 58084429A JP 8442983 A JP8442983 A JP 8442983A JP S59209677 A JPS59209677 A JP S59209677A
Authority
JP
Japan
Prior art keywords
coated
workpiece
coating
arm
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58084429A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6330067B2 (enExample
Inventor
Takeshi Shiraishi
白石　健
Katsuyuki Yamamoto
勝之 山本
Takao Inoue
孝夫 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58084429A priority Critical patent/JPS59209677A/ja
Publication of JPS59209677A publication Critical patent/JPS59209677A/ja
Publication of JPS6330067B2 publication Critical patent/JPS6330067B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP58084429A 1983-05-13 1983-05-13 コ−テイング装置 Granted JPS59209677A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58084429A JPS59209677A (ja) 1983-05-13 1983-05-13 コ−テイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58084429A JPS59209677A (ja) 1983-05-13 1983-05-13 コ−テイング装置

Publications (2)

Publication Number Publication Date
JPS59209677A true JPS59209677A (ja) 1984-11-28
JPS6330067B2 JPS6330067B2 (enExample) 1988-06-16

Family

ID=13830335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58084429A Granted JPS59209677A (ja) 1983-05-13 1983-05-13 コ−テイング装置

Country Status (1)

Country Link
JP (1) JPS59209677A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05103150A (ja) * 1991-10-04 1993-04-23 Bussan Komutoran:Kk フアクシミリ装置

Also Published As

Publication number Publication date
JPS6330067B2 (enExample) 1988-06-16

Similar Documents

Publication Publication Date Title
JPS59209677A (ja) コ−テイング装置
JPS61149962A (ja) 電子写真感光体の製造方法
JPH0330874A (ja) 平面デイスプレー用ベースプレートの薄層塗布方法および装置
JP2001176775A (ja) 半導体ウェハの塗膜形成方法
JPS584587B2 (ja) 回転式粘性剤塗布方法およびその装置
JP2003203401A5 (enExample)
JP2002093680A (ja) フォトレジスト塗布方法及び塗布装置
JPS614573A (ja) 塗布装置
JPS62176572A (ja) 塗膜形成装置
JPS5941788B2 (ja) 回転式塗布装置
JPS6231622B2 (enExample)
JPH039131Y2 (enExample)
JPH02156418A (ja) 磁気ディスク潤滑膜の成膜法
JPH05135987A (ja) コイルのワニス塗布方法
JPS649622B2 (enExample)
JPS60256944A (ja) 円盤保護硬化被膜の形成方法
JPS591384B2 (ja) 塗布方法及び塗布装置
JP2623582B2 (ja) 陰極線管蛍光面の形成方法
JPH0369918A (ja) 液晶パネルの製造方法
JPS58215771A (ja) デイスク洗浄乾燥装置
JPS5914890B2 (ja) 回転塗布方法
JPH02123362A (ja) レジスト塗布方法およびレジスト塗布装置
JPH06154694A (ja) レジスト塗布装置
JP2001143998A (ja) レジスト塗布方法及び装置
JPH0744142B2 (ja) フォトレジスト飛散物の除去方法