JPS59206042A - 微粉末の製造方法及び製造装置 - Google Patents
微粉末の製造方法及び製造装置Info
- Publication number
- JPS59206042A JPS59206042A JP58079728A JP7972883A JPS59206042A JP S59206042 A JPS59206042 A JP S59206042A JP 58079728 A JP58079728 A JP 58079728A JP 7972883 A JP7972883 A JP 7972883A JP S59206042 A JPS59206042 A JP S59206042A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- reaction chamber
- reaction
- discharge
- fine powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 238000006243 chemical reaction Methods 0.000 claims abstract description 27
- 239000007789 gas Substances 0.000 claims abstract description 19
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 239000012495 reaction gas Substances 0.000 claims abstract description 10
- 230000001678 irradiating effect Effects 0.000 claims abstract 3
- 238000007599 discharging Methods 0.000 claims abstract 2
- 238000000034 method Methods 0.000 claims description 7
- 238000003786 synthesis reaction Methods 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 6
- 229910001507 metal halide Inorganic materials 0.000 claims description 2
- 150000005309 metal halides Chemical class 0.000 claims description 2
- 150000002894 organic compounds Chemical class 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 4
- 150000002736 metal compounds Chemical class 0.000 claims 3
- 229910001111 Fine metal Inorganic materials 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 230000002194 synthesizing effect Effects 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 150000004678 hydrides Chemical class 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 229910052987 metal hydride Inorganic materials 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052802 copper Inorganic materials 0.000 abstract description 2
- 239000010949 copper Substances 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 5
- 229910010271 silicon carbide Inorganic materials 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 229910052582 BN Inorganic materials 0.000 description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 150000001247 metal acetylides Chemical class 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000001308 synthesis method Methods 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 229910052580 B4C Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000003039 volatile agent Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
- B01J12/002—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor carried out in the plasma state
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/121—Coherent waves, e.g. laser beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/16—Making metallic powder or suspensions thereof using chemical processes
- B22F9/30—Making metallic powder or suspensions thereof using chemical processes with decomposition of metal compounds, e.g. by pyrolysis
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/064—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
- C01B21/0682—Preparation by direct nitridation of silicon
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
- C01B21/0722—Preparation by direct nitridation of aluminium
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
- C01B21/0722—Preparation by direct nitridation of aluminium
- C01B21/0724—Preparation by direct nitridation of aluminium using a plasma
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/076—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with titanium or zirconium or hafnium
- C01B21/0763—Preparation from titanium, zirconium or hafnium halides
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/076—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with titanium or zirconium or hafnium
- C01B21/0765—Preparation by carboreductive nitridation
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/0828—Carbonitrides or oxycarbonitrides of metals, boron or silicon
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
- C01B32/963—Preparation from compounds containing silicon
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
- C01B32/963—Preparation from compounds containing silicon
- C01B32/977—Preparation from organic compounds containing silicon
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
- C22B9/16—Remelting metals
- C22B9/22—Remelting metals with heating by wave energy or particle radiation
- C22B9/221—Remelting metals with heating by wave energy or particle radiation by electromagnetic waves, e.g. by gas discharge lamps
- C22B9/223—Remelting metals with heating by wave energy or particle radiation by electromagnetic waves, e.g. by gas discharge lamps by laser beams
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Nanotechnology (AREA)
- Materials Engineering (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Composite Materials (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Toxicology (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Carbon And Carbon Compounds (AREA)
- Silicon Compounds (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58079728A JPS59206042A (ja) | 1983-05-07 | 1983-05-07 | 微粉末の製造方法及び製造装置 |
| US06/605,489 US4556416A (en) | 1983-05-07 | 1984-04-30 | Process and apparatus for manufacturing fine powder |
| DE8484105147T DE3483490D1 (de) | 1983-05-07 | 1984-05-07 | Verfahren und vorrichtung zur herstellung feinen pulvers. |
| EP84105147A EP0124901B1 (en) | 1983-05-07 | 1984-05-07 | Process and apparatus for manufacturing fine powder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58079728A JPS59206042A (ja) | 1983-05-07 | 1983-05-07 | 微粉末の製造方法及び製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59206042A true JPS59206042A (ja) | 1984-11-21 |
| JPH0366014B2 JPH0366014B2 (enExample) | 1991-10-15 |
Family
ID=13698258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58079728A Granted JPS59206042A (ja) | 1983-05-07 | 1983-05-07 | 微粉末の製造方法及び製造装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4556416A (enExample) |
| EP (1) | EP0124901B1 (enExample) |
| JP (1) | JPS59206042A (enExample) |
| DE (1) | DE3483490D1 (enExample) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61200850A (ja) * | 1985-02-28 | 1986-09-05 | Daido Steel Co Ltd | 化合物超微粒子の製造方法 |
| JPS62102828A (ja) * | 1985-10-28 | 1987-05-13 | Daido Steel Co Ltd | 化合物微粒子の製造方法 |
| JP2000061288A (ja) * | 1998-05-12 | 2000-02-29 | Degussa Huels Ag | 粉末状の不均一物質の製造法 |
| WO2007086367A1 (ja) * | 2006-01-27 | 2007-08-02 | Konica Minolta Medical & Graphic, Inc. | Ｓｉ／Ｓｉ３Ｎ４型ナノ粒子、該ナノ粒子を用いた生体物質標識剤及び前記ナノ粒子の製造方法 |
| JP2008505992A (ja) * | 2004-07-09 | 2008-02-28 | ビーエーエスエフ アクチェンゲゼルシャフト | ナノ粒子の製造法および製造装置 |
| WO2010041658A1 (ja) * | 2008-10-06 | 2010-04-15 | 昭和電工株式会社 | 炭窒化物混合物粒子または炭窒酸化物混合物粒子の製造方法及びその用途 |
| JP2022543985A (ja) * | 2019-06-28 | 2022-10-17 | イージュール，アイエヌシー． | 処理システムの反応室の内側のアシストガス流 |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62501838A (ja) * | 1985-02-12 | 1987-07-23 | ザ・ダウ・ケミカル・カンパニ− | １ミクロンより小さい炭化ホウ素粉末を製造する方法 |
| US4895628A (en) * | 1985-02-12 | 1990-01-23 | The Dow Chemical Company | Process for the preparation of submicron-sized boron carbide powders |
| US4689129A (en) * | 1985-07-16 | 1987-08-25 | The Dow Chemical Company | Process for the preparation of submicron-sized titanium diboride |
| US4687753A (en) * | 1985-10-25 | 1987-08-18 | Exxon Research And Engineering Company | Laser produced iron carbide-based catalysts |
| US4758267A (en) * | 1985-12-23 | 1988-07-19 | Energy Science Laboratories, Inc. | Ultrafine particle and fiber production in microgravity |
| US4784686A (en) * | 1987-04-24 | 1988-11-15 | The United States Of America As Represented By The United States Department Of Energy | Synthesis of ultrafine powders by microwave heating |
| US4957884A (en) * | 1987-04-27 | 1990-09-18 | The Dow Chemical Company | Titanium diboride/boron carbide composites with high hardness and toughness |
| US5032242A (en) * | 1987-04-27 | 1991-07-16 | The Dow Chemical Company | Titanium diboride/boron carbide composites with high hardness and toughness |
| KR910001933B1 (ko) * | 1987-04-27 | 1991-03-30 | 더 다우 케미칼 캄파니 | 고경도 및 인성을 갖는 이붕소화 티탄/탄화붕소 조성물 |
| DE4214720C2 (de) * | 1992-05-04 | 1994-10-13 | Starck H C Gmbh Co Kg | Vorrichtung zur Herstellung feinteiliger Metall- und Keramikpulver |
| US5460701A (en) * | 1993-07-27 | 1995-10-24 | Nanophase Technologies Corporation | Method of making nanostructured materials |
| US5525320A (en) * | 1994-07-11 | 1996-06-11 | University Of Cincinnati | Process for aluminum nitride powder production |
| WO1996006700A2 (en) * | 1994-08-25 | 1996-03-07 | Qqc, Inc. | Nanoscale particles, and uses for same |
| WO1997048651A2 (en) * | 1996-06-20 | 1997-12-24 | Qqc, Inc. | Method of making ultrafine materials including metals, ceramics, and diamonds |
| EP0910468A1 (en) | 1996-07-11 | 1999-04-28 | University of Cincinnati | Electrically assisted synthesis of particles and films with precisely controlled characteristics |
| US5958348A (en) * | 1997-02-28 | 1999-09-28 | Nanogram Corporation | Efficient production of particles by chemical reaction |
| US7384680B2 (en) * | 1997-07-21 | 2008-06-10 | Nanogram Corporation | Nanoparticle-based power coatings and corresponding structures |
| US20010051118A1 (en) * | 1999-07-21 | 2001-12-13 | Ronald J. Mosso | Particle production apparatus |
| US6919054B2 (en) * | 2002-04-10 | 2005-07-19 | Neophotonics Corporation | Reactant nozzles within flowing reactors |
| US6849334B2 (en) | 2001-08-17 | 2005-02-01 | Neophotonics Corporation | Optical materials and optical devices |
| US6726990B1 (en) | 1998-05-27 | 2004-04-27 | Nanogram Corporation | Silicon oxide particles |
| US6290735B1 (en) | 1997-10-31 | 2001-09-18 | Nanogram Corporation | Abrasive particles for surface polishing |
| EP1166286A4 (en) | 1999-03-10 | 2005-08-10 | Neophotonics Corp | ZINC OXIDE PARTICLES |
| US6723435B1 (en) * | 2001-08-28 | 2004-04-20 | Nanogram Corporation | Optical fiber preforms |
| US20060225534A1 (en) * | 2004-10-13 | 2006-10-12 | The Research Foundation Of State University Of New York | Production of nickel nanoparticles from a nickel precursor via laser pyrolysis |
| US20060266216A1 (en) * | 2005-05-24 | 2006-11-30 | Cabot Corporation | High-throughput powder synthesis system |
| FR2945035B1 (fr) * | 2009-04-29 | 2011-07-01 | Commissariat Energie Atomique | Procede d'elaboration d'une poudre comprenant du carbone, du silicium et du bore, le silicium se presentant sous forme de carbure de silicium et le bore se presentant sous forme de carbure de bore et/ou de bore seul |
| IL288744B1 (en) | 2019-06-12 | 2026-06-01 | Univ Auburn | A new additive nanofabrication system and method |
| FR3151321A1 (fr) * | 2023-07-19 | 2025-01-24 | Renault S.A.S | Procédé de formation de silicium à partir de silice et silicium passivé |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS50100497A (enExample) * | 1973-12-27 | 1975-08-09 | ||
| JPS5536960A (en) * | 1978-09-05 | 1980-03-14 | Mitsubishi Electric Corp | Method for cleaning semiconductor producing apparatus |
| JPS56136634A (en) * | 1980-03-29 | 1981-10-26 | Res Dev Corp Of Japan | Production of ultra-fine powder and particle using laser beam |
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|---|---|---|---|---|
| DE1087869B (de) * | 1955-08-08 | 1960-08-25 | Siemens Ag | Verfahren zum Gewinnen hochreiner Metalle oder Halbleitergrundstoffe |
| FR1150562A (fr) * | 1956-05-12 | 1958-01-15 | Saint Gobain | Procédé pour la fabrication de métaux de haute pureté |
| DE1066549B (de) * | 1957-07-17 | 1959-10-08 | Societe Anonyme des Manufactures des Glaces et Produits Chimiques de Saint-Gobain, Chauny &. Cirey, Paris | Verfahren zur Herstellung von chemischen Verbindungen von hohem Reinheitsgrad |
| US3545922A (en) * | 1964-12-10 | 1970-12-08 | Starck Hermann C Fa | Process for the preparation of finely divided,non-pyrophoric nitrides of zirconium,hafnium,niobium and tantalum |
| NL6608845A (enExample) * | 1965-06-25 | 1966-12-27 | ||
| US3535103A (en) * | 1968-04-10 | 1970-10-20 | Atomic Energy Commission | Method of making metal alloy powders |
| US3671220A (en) * | 1969-05-19 | 1972-06-20 | Nordstjernan Rederi Ab | Process for the production of powdered metals |
| US4289952A (en) * | 1979-12-12 | 1981-09-15 | Massachusetts Institute Of Technology | Process for controlling powder size with optical energy |
-
1983
- 1983-05-07 JP JP58079728A patent/JPS59206042A/ja active Granted
-
1984
- 1984-04-30 US US06/605,489 patent/US4556416A/en not_active Expired - Fee Related
- 1984-05-07 DE DE8484105147T patent/DE3483490D1/de not_active Expired - Lifetime
- 1984-05-07 EP EP84105147A patent/EP0124901B1/en not_active Expired - Lifetime
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50100497A (enExample) * | 1973-12-27 | 1975-08-09 | ||
| JPS5536960A (en) * | 1978-09-05 | 1980-03-14 | Mitsubishi Electric Corp | Method for cleaning semiconductor producing apparatus |
| JPS56136634A (en) * | 1980-03-29 | 1981-10-26 | Res Dev Corp Of Japan | Production of ultra-fine powder and particle using laser beam |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61200850A (ja) * | 1985-02-28 | 1986-09-05 | Daido Steel Co Ltd | 化合物超微粒子の製造方法 |
| JPS62102828A (ja) * | 1985-10-28 | 1987-05-13 | Daido Steel Co Ltd | 化合物微粒子の製造方法 |
| JP2000061288A (ja) * | 1998-05-12 | 2000-02-29 | Degussa Huels Ag | 粉末状の不均一物質の製造法 |
| JP2008505992A (ja) * | 2004-07-09 | 2008-02-28 | ビーエーエスエフ アクチェンゲゼルシャフト | ナノ粒子の製造法および製造装置 |
| JP5082860B2 (ja) * | 2006-01-27 | 2012-11-28 | コニカミノルタエムジー株式会社 | Ｓｉ／Ｓｉ３Ｎ４型ナノ粒子、該ナノ粒子を用いた生体物質標識剤及び前記ナノ粒子の製造方法 |
| WO2007086367A1 (ja) * | 2006-01-27 | 2007-08-02 | Konica Minolta Medical & Graphic, Inc. | Ｓｉ／Ｓｉ３Ｎ４型ナノ粒子、該ナノ粒子を用いた生体物質標識剤及び前記ナノ粒子の製造方法 |
| US8658432B2 (en) | 2006-01-27 | 2014-02-25 | Konica Minolta Medical & Graphic, Inc. | Si/Si3N4 system nanosized particles, biosubstance labeling agent employing the nanosized particles, and method of manufacturing the nanosized particles |
| JP4970597B2 (ja) * | 2008-10-06 | 2012-07-11 | 昭和電工株式会社 | 炭窒化物混合物粒子または炭窒酸化物混合物粒子の製造方法及びその用途 |
| WO2010041658A1 (ja) * | 2008-10-06 | 2010-04-15 | 昭和電工株式会社 | 炭窒化物混合物粒子または炭窒酸化物混合物粒子の製造方法及びその用途 |
| EP2347996A4 (en) * | 2008-10-06 | 2014-03-05 | Showa Denko Kk | PROCESS FOR PRODUCING CARBONITRIDE MIXTURE PARTICLE OR OXYCARBONITRIDE MIXTURE PARTICLE, AND USE THEREOF |
| US8703638B2 (en) | 2008-10-06 | 2014-04-22 | Showa Denko K.K. | Process for production and use of carbonitride mixture particles or oxycarbonitride mixture particles |
| US9093714B2 (en) | 2008-10-06 | 2015-07-28 | Showa Denko K.K. | Process for production and use of carbonitride mixture particles or oxycarbonitride mixture particles |
| JP2022543985A (ja) * | 2019-06-28 | 2022-10-17 | イージュール，アイエヌシー． | 処理システムの反応室の内側のアシストガス流 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0124901A3 (en) | 1988-01-07 |
| JPH0366014B2 (enExample) | 1991-10-15 |
| DE3483490D1 (de) | 1990-12-06 |
| EP0124901A2 (en) | 1984-11-14 |
| US4556416A (en) | 1985-12-03 |
| EP0124901B1 (en) | 1990-10-31 |
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