JPS59199577A - 耐熱性窒化硅素焼結体及びその製造方法 - Google Patents
耐熱性窒化硅素焼結体及びその製造方法Info
- Publication number
- JPS59199577A JPS59199577A JP58071299A JP7129983A JPS59199577A JP S59199577 A JPS59199577 A JP S59199577A JP 58071299 A JP58071299 A JP 58071299A JP 7129983 A JP7129983 A JP 7129983A JP S59199577 A JPS59199577 A JP S59199577A
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- si3n4
- sintering
- silicon nitride
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 62
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000005245 sintering Methods 0.000 claims description 49
- 150000004767 nitrides Chemical class 0.000 claims description 16
- 239000000843 powder Substances 0.000 claims description 16
- 229910052782 aluminium Inorganic materials 0.000 claims description 14
- 229910052796 boron Inorganic materials 0.000 claims description 13
- 229910052733 gallium Inorganic materials 0.000 claims description 13
- 239000011812 mixed powder Substances 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 229910052727 yttrium Inorganic materials 0.000 claims description 3
- 229910052747 lanthanoid Inorganic materials 0.000 claims 2
- 150000002602 lanthanoids Chemical class 0.000 claims 2
- 241001474791 Proboscis Species 0.000 claims 1
- 239000004744 fabric Substances 0.000 claims 1
- 150000004678 hydrides Chemical class 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 150000003377 silicon compounds Chemical class 0.000 claims 1
- 239000012071 phase Substances 0.000 description 24
- 150000001875 compounds Chemical class 0.000 description 13
- 238000000034 method Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- 229910052761 rare earth metal Inorganic materials 0.000 description 10
- 239000007858 starting material Substances 0.000 description 10
- 238000005520 cutting process Methods 0.000 description 9
- 239000002131 composite material Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 229910052593 corundum Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 229910001845 yogo sapphire Inorganic materials 0.000 description 5
- 229910005091 Si3N Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- -1 anion ions Chemical class 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000009257 reactivity Effects 0.000 description 4
- 238000005204 segregation Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 235000013339 cereals Nutrition 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 3
- 150000004760 silicates Chemical class 0.000 description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- 239000012752 auxiliary agent Substances 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011121 hardwood Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000011435 rock Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910000601 superalloy Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000002023 wood Substances 0.000 description 2
- 244000283070 Abies balsamea Species 0.000 description 1
- 235000007173 Abies balsamea Nutrition 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 102000004190 Enzymes Human genes 0.000 description 1
- 108090000790 Enzymes Proteins 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 206010028980 Neoplasm Diseases 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 238000007545 Vickers hardness test Methods 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 210000001217 buttock Anatomy 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000002008 hemorrhagic effect Effects 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000009863 impact test Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000000462 isostatic pressing Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58071299A JPS59199577A (ja) | 1983-04-22 | 1983-04-22 | 耐熱性窒化硅素焼結体及びその製造方法 |
| EP19840104449 EP0123292B1 (en) | 1983-04-22 | 1984-04-19 | Silicon nitride sintered body and method for preparing the same |
| CA000452515A CA1223013A (en) | 1983-04-22 | 1984-04-19 | Silicon nitride sintered body and method for preparing the same |
| DE8484104449T DE3483588D1 (de) | 1983-04-22 | 1984-04-19 | Gesinterter siliziumnitridformkoerper und verfahren zu seiner herstellung. |
| US06/602,555 US4609633A (en) | 1983-04-22 | 1984-04-20 | Silicon nitride sintered body and method for preparing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58071299A JPS59199577A (ja) | 1983-04-22 | 1983-04-22 | 耐熱性窒化硅素焼結体及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59199577A true JPS59199577A (ja) | 1984-11-12 |
| JPH0512297B2 JPH0512297B2 (enrdf_load_stackoverflow) | 1993-02-17 |
Family
ID=13456638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58071299A Granted JPS59199577A (ja) | 1983-04-22 | 1983-04-22 | 耐熱性窒化硅素焼結体及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59199577A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61247665A (ja) * | 1985-04-25 | 1986-11-04 | 東芝タンガロイ株式会社 | β型窒化珪素基酸窒化物焼結体およびその製造方法 |
| JPH03504959A (ja) * | 1989-01-17 | 1991-10-31 | アライド―シグナル・インコーポレーテッド | 超靭性モノリシック窒化ケイ素 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57175777A (en) * | 1981-04-23 | 1982-10-28 | Ube Industries | Manufacture of silicon nitride sintered body |
| JPS58204874A (ja) * | 1982-05-20 | 1983-11-29 | 日産自動車株式会社 | 窒化珪素質焼結体 |
-
1983
- 1983-04-22 JP JP58071299A patent/JPS59199577A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57175777A (en) * | 1981-04-23 | 1982-10-28 | Ube Industries | Manufacture of silicon nitride sintered body |
| JPS58204874A (ja) * | 1982-05-20 | 1983-11-29 | 日産自動車株式会社 | 窒化珪素質焼結体 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61247665A (ja) * | 1985-04-25 | 1986-11-04 | 東芝タンガロイ株式会社 | β型窒化珪素基酸窒化物焼結体およびその製造方法 |
| JPH03504959A (ja) * | 1989-01-17 | 1991-10-31 | アライド―シグナル・インコーポレーテッド | 超靭性モノリシック窒化ケイ素 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0512297B2 (enrdf_load_stackoverflow) | 1993-02-17 |
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