JPS59196600A - 中性粒子注入法およびその装置 - Google Patents

中性粒子注入法およびその装置

Info

Publication number
JPS59196600A
JPS59196600A JP58070233A JP7023383A JPS59196600A JP S59196600 A JPS59196600 A JP S59196600A JP 58070233 A JP58070233 A JP 58070233A JP 7023383 A JP7023383 A JP 7023383A JP S59196600 A JPS59196600 A JP S59196600A
Authority
JP
Japan
Prior art keywords
ions
gas chamber
ion implantation
energy
target material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58070233A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0223021B2 (enExample
Inventor
清水　啓三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58070233A priority Critical patent/JPS59196600A/ja
Publication of JPS59196600A publication Critical patent/JPS59196600A/ja
Publication of JPH0223021B2 publication Critical patent/JPH0223021B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP58070233A 1983-04-21 1983-04-21 中性粒子注入法およびその装置 Granted JPS59196600A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58070233A JPS59196600A (ja) 1983-04-21 1983-04-21 中性粒子注入法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58070233A JPS59196600A (ja) 1983-04-21 1983-04-21 中性粒子注入法およびその装置

Publications (2)

Publication Number Publication Date
JPS59196600A true JPS59196600A (ja) 1984-11-07
JPH0223021B2 JPH0223021B2 (enExample) 1990-05-22

Family

ID=13425637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58070233A Granted JPS59196600A (ja) 1983-04-21 1983-04-21 中性粒子注入法およびその装置

Country Status (1)

Country Link
JP (1) JPS59196600A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63126220A (ja) * 1986-11-14 1988-05-30 Mitsubishi Electric Corp 不純物添加方法
JPS63166221A (ja) * 1986-12-27 1988-07-09 Mitsubishi Electric Corp 半導体装置の製造方法
JPH02102654U (enExample) * 1989-02-02 1990-08-15
JP2013545353A (ja) * 2010-10-15 2013-12-19 コミシリア ア レネルジ アトミック エ オ エナジーズ オルタネティヴズ 均質な材料から形成された不均質な音響構造

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53136798A (en) * 1977-05-05 1978-11-29 Ibm Ion beam bombardment device
JPS5787056A (en) * 1980-09-24 1982-05-31 Varian Associates Method and device for strengthening neutralization of ion beam of positive charge

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53136798A (en) * 1977-05-05 1978-11-29 Ibm Ion beam bombardment device
JPS5787056A (en) * 1980-09-24 1982-05-31 Varian Associates Method and device for strengthening neutralization of ion beam of positive charge

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63126220A (ja) * 1986-11-14 1988-05-30 Mitsubishi Electric Corp 不純物添加方法
JPS63166221A (ja) * 1986-12-27 1988-07-09 Mitsubishi Electric Corp 半導体装置の製造方法
JPH02102654U (enExample) * 1989-02-02 1990-08-15
JP2013545353A (ja) * 2010-10-15 2013-12-19 コミシリア ア レネルジ アトミック エ オ エナジーズ オルタネティヴズ 均質な材料から形成された不均質な音響構造
US9209779B2 (en) 2010-10-15 2015-12-08 Commissariat A L'energie Atomique Et Aux Energies Alternatives Heterogenous acoustic structure formed from a homogeneous material

Also Published As

Publication number Publication date
JPH0223021B2 (enExample) 1990-05-22

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