JPS59190360A - 真空蒸着メツキ用蒸着鍋の浮遊異物除去装置 - Google Patents

真空蒸着メツキ用蒸着鍋の浮遊異物除去装置

Info

Publication number
JPS59190360A
JPS59190360A JP6229083A JP6229083A JPS59190360A JP S59190360 A JPS59190360 A JP S59190360A JP 6229083 A JP6229083 A JP 6229083A JP 6229083 A JP6229083 A JP 6229083A JP S59190360 A JPS59190360 A JP S59190360A
Authority
JP
Japan
Prior art keywords
foreign matter
plating
plating material
vapor
pan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6229083A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0252717B2 (enrdf_load_stackoverflow
Inventor
Shigeo Itano
板野　重夫
Tetsuyoshi Wada
哲義 和田
Shinji Nakagawa
中川　新二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Nippon Steel Nisshin Co Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd, Nisshin Steel Co Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP6229083A priority Critical patent/JPS59190360A/ja
Publication of JPS59190360A publication Critical patent/JPS59190360A/ja
Publication of JPH0252717B2 publication Critical patent/JPH0252717B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP6229083A 1983-04-11 1983-04-11 真空蒸着メツキ用蒸着鍋の浮遊異物除去装置 Granted JPS59190360A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6229083A JPS59190360A (ja) 1983-04-11 1983-04-11 真空蒸着メツキ用蒸着鍋の浮遊異物除去装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6229083A JPS59190360A (ja) 1983-04-11 1983-04-11 真空蒸着メツキ用蒸着鍋の浮遊異物除去装置

Publications (2)

Publication Number Publication Date
JPS59190360A true JPS59190360A (ja) 1984-10-29
JPH0252717B2 JPH0252717B2 (enrdf_load_stackoverflow) 1990-11-14

Family

ID=13195835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6229083A Granted JPS59190360A (ja) 1983-04-11 1983-04-11 真空蒸着メツキ用蒸着鍋の浮遊異物除去装置

Country Status (1)

Country Link
JP (1) JPS59190360A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0252717B2 (enrdf_load_stackoverflow) 1990-11-14

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