JPH0252717B2 - - Google Patents
Info
- Publication number
- JPH0252717B2 JPH0252717B2 JP6229083A JP6229083A JPH0252717B2 JP H0252717 B2 JPH0252717 B2 JP H0252717B2 JP 6229083 A JP6229083 A JP 6229083A JP 6229083 A JP6229083 A JP 6229083A JP H0252717 B2 JPH0252717 B2 JP H0252717B2
- Authority
- JP
- Japan
- Prior art keywords
- plating material
- pot
- vapor deposition
- molten plating
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007747 plating Methods 0.000 claims description 53
- 239000000463 material Substances 0.000 claims description 48
- 238000007740 vapor deposition Methods 0.000 claims description 27
- 239000007788 liquid Substances 0.000 claims description 20
- 238000001704 evaporation Methods 0.000 claims description 11
- 230000008020 evaporation Effects 0.000 claims description 11
- 238000007738 vacuum evaporation Methods 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 7
- 238000001771 vacuum deposition Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 description 8
- 238000002844 melting Methods 0.000 description 8
- 229910000831 Steel Inorganic materials 0.000 description 7
- 239000010959 steel Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6229083A JPS59190360A (ja) | 1983-04-11 | 1983-04-11 | 真空蒸着メツキ用蒸着鍋の浮遊異物除去装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6229083A JPS59190360A (ja) | 1983-04-11 | 1983-04-11 | 真空蒸着メツキ用蒸着鍋の浮遊異物除去装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59190360A JPS59190360A (ja) | 1984-10-29 |
| JPH0252717B2 true JPH0252717B2 (enrdf_load_stackoverflow) | 1990-11-14 |
Family
ID=13195835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6229083A Granted JPS59190360A (ja) | 1983-04-11 | 1983-04-11 | 真空蒸着メツキ用蒸着鍋の浮遊異物除去装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59190360A (enrdf_load_stackoverflow) |
-
1983
- 1983-04-11 JP JP6229083A patent/JPS59190360A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59190360A (ja) | 1984-10-29 |
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