JPS59181524A - 基板上に形成された磁性膜とその製造方法 - Google Patents

基板上に形成された磁性膜とその製造方法

Info

Publication number
JPS59181524A
JPS59181524A JP5541583A JP5541583A JPS59181524A JP S59181524 A JPS59181524 A JP S59181524A JP 5541583 A JP5541583 A JP 5541583A JP 5541583 A JP5541583 A JP 5541583A JP S59181524 A JPS59181524 A JP S59181524A
Authority
JP
Japan
Prior art keywords
substrate
film
magnetic
surface roughness
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5541583A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0226774B2 (enExample
Inventor
Masaki Shinohara
正喜 篠原
Keiji Shono
敬二 庄野
Masahiro Miyazaki
宮崎　正裕
Hiroaki Wakamatsu
若松　弘晃
Katsuhiko Nakagawa
中川　雄彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5541583A priority Critical patent/JPS59181524A/ja
Publication of JPS59181524A publication Critical patent/JPS59181524A/ja
Publication of JPH0226774B2 publication Critical patent/JPH0226774B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP5541583A 1983-03-31 1983-03-31 基板上に形成された磁性膜とその製造方法 Granted JPS59181524A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5541583A JPS59181524A (ja) 1983-03-31 1983-03-31 基板上に形成された磁性膜とその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5541583A JPS59181524A (ja) 1983-03-31 1983-03-31 基板上に形成された磁性膜とその製造方法

Publications (2)

Publication Number Publication Date
JPS59181524A true JPS59181524A (ja) 1984-10-16
JPH0226774B2 JPH0226774B2 (enExample) 1990-06-12

Family

ID=12997932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5541583A Granted JPS59181524A (ja) 1983-03-31 1983-03-31 基板上に形成された磁性膜とその製造方法

Country Status (1)

Country Link
JP (1) JPS59181524A (enExample)

Also Published As

Publication number Publication date
JPH0226774B2 (enExample) 1990-06-12

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